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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 20938–20944

Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45° micro-reflector

Hsiao-Chin Lan, Hsu-Liang Hsiao, Chia-Chi Chang, Chih-Hung Hsu, Chih-Ming Wang, and Mount-Learn Wu  »View Author Affiliations

Optics Express, Vol. 17, Issue 23, pp. 20938-20944 (2009)

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A monolithically integrated micro-optical element consisting of a diffractive optical element (DOE) and a silicon-based 45° micro-reflector is experimentally demonstrated to facilitate the optical alignment of non-coplanar fiber-to-fiber coupling. The slanted 45° reflector with a depth of 216 μm is fabricated on a (100) silicon wafer by anisotropic wet etching. The DOE with a diameter of 174.2 μm and a focal length of 150 μm is formed by means of dry etching. Such a compact device is suitable for the optical micro-system to deflect the incident light by 90° and to focus it on the image plane simultaneously. The measured light pattern with a spot size of 15 μm has a good agreement with the simulated result of the elliptic-symmetry DOE with an off-axis design for eliminating the strongly astigmatic aberration. The coupling efficiency is enhanced over 10-folds of the case without a DOE on the 45° micro-reflector. This device would facilitate the optical alignment of non-coplanar light coupling and further miniaturize the volume of microsystem.

© 2009 OSA

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
Diffraction and Gratings

Original Manuscript: September 16, 2009
Revised Manuscript: October 29, 2009
Manuscript Accepted: October 29, 2009
Published: November 2, 2009

Hsiao-Chin Lan, Hsu-Liang Hsiao, Chia-Chi Chang, Chih-Hung Hsu, Chih-Ming Wang, and Mount-Learn Wu, "Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45° micro-reflector," Opt. Express 17, 20938-20944 (2009)

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  1. H. L. Althaus, W. Gramann, and K. Panzer, “Microsystems and wafer processes for volume production of highly reliable fiber optic components for telecom- and datacom-application,” IEEE Trans. on Compon., Packag., and Manufact. Technol. pt. B 21(2), 147–156 (1998). [CrossRef]
  2. D. Shimura, R. Sekikawa, K. Kotani, M. Uekawa, Y. Maeno, K. Aoyama, H. Sasaki, T. Takamori, K. Masuko, and S. Nakaya, “Bidirectional optical subassembly with prealigned silicon microlens and laser diode,” IEEE Photon. Technol. Lett. 18(16), 1738–1740 (2006). [CrossRef]
  3. E. Mohammed, T. Thomas, H. Braunisch, D. Lu, J. Heck, A. Liu, I. Young, B. Barnett, G. Vandentop, and R. Mooney, “Optical interconnect system integration for ultra-short-reach applications,” Intel Technol. J. 8(2), 115–128 (2004).
  4. H. Takahara, “Optoelectronic multichip module packaging technologies and optical input/output interface chip-level packages for the next generation of hardware systems,” IEEE J. Sel. Top. Quantum Electron. 9(2), 443–451 (2003). [CrossRef]
  5. Y. Ishii, N. Tanaka, T. Sakamoto, and H. Takahara, “Fully SMT-compatible optical –I/O package with microlens array interface,” IEEE J. Lightwave Technol. 21(1), 275–280 (2003). [CrossRef]
  6. B. S. Rho, S. Kang, H. S. Cho, H. H. Park, S. W. Ha, and B. H. Rhee, “PCB-compatible optical interconnection using 45°-ended connection rods and via-holed waveguides,” IEEE J. Lightwave Technol. 22(9), 2128–2134 (2004). [CrossRef]
  7. J. Y. Chang, C. M. Wang, C. C. Lee, H. F. Shih, and M. L. Wu, “Realization of free-space optical pickup head with stacked si-based phase elements,” IEEE Photon. Technol. Lett. 17(1), 214–216 (2005). [CrossRef]
  8. M. Uekawa, H. Sasaki, D. Shimura, K. Kotani, Y. Maeno, and T. Takamori, “Surface-mountable silicon microlens for low-cost laser modules,” IEEE Photon. Technol. Lett. 15(7), 945–947 (2003). [CrossRef]
  9. V. N. Mahajan, Optical Imaging and Aberrations: Part I. Ray Geometrical Optics (SPIE Press, 1998), Chap. 3.
  10. H. H. Sasaki, S. S. Takasaki, K. K. Kotani, and T. T. Takamori, “Compact bidirectional photonic circuit employing stacked multilayers of diffractive optical elements for fiber to the home applications,” Proc. SPIE 4437, 108–115 (2001). [CrossRef]
  11. I. Zubel, “Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions,” Sens. Actuators A Phys. 84(1–2), 116–125 (2000). [CrossRef]
  12. S. Hiramatsu and T. Mikawa, “Optical design of active interposer for high-speed chip level optical interconnects,” IEEE J. Lightwave Technol. 24(2), 927–934 (2006). [CrossRef]
  13. N. Izhaky, M. T. Morse, S. Koehl, O. Cohen, D. Rubin, A. Barkai, G. Sarid, R. Cohen, and M. J. Paniccia, “Development of cmos-compatible integrated silicon photonics devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1688–1698 (2006). [CrossRef]

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