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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 20991–20997

Light-extraction enhancement of red AlGaInP light-emitting diodes with antireflective subwavelength structures

Y. M. Song, E. S. Choi, J. S. Yu, and Y. T. Lee  »View Author Affiliations


Optics Express, Vol. 17, Issue 23, pp. 20991-20997 (2009)
http://dx.doi.org/10.1364/OE.17.020991


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Abstract

We demonstrate the enhancement of light extraction in 633 nm AlGaInP light-emitting diodes (LEDs) with antireflective subwavelength structures (SWS). From the contour plots by the rigorous coupled wave analysis method, it is found that the reduction of the internal reflection strongly depends on the period of SWS. The Ag nanoparticles formed by thermal dewetting were used as an etch mask for dry etch process to fabricate antireflective SWS on the LED surface. The tapered pillars on the GaP were fabricated, on average, with distances below 200 nm, satisfying the required antireflection condition at the emission wavelength. The improvement in light output power by ~26.4% was achieved for the fabricated AlGaInP LEDs with SWS compared to the conventional LEDs due to a strongly reduced Fresnel internal reflection at the GaP/air interface. The improved directionality in the far-field pattern was also obtained due to the directional light extraction enhancement.

© 2009 OSA

OCIS Codes
(230.3670) Optical devices : Light-emitting diodes
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Optical Devices

History
Original Manuscript: August 17, 2009
Manuscript Accepted: October 23, 2009
Published: November 3, 2009

Citation
Y. M. Song, E. S. Choi, J. S. Yu, and Y. T. Lee, "Light-extraction enhancement of red AlGaInP light-emitting diodes with antireflective subwavelength structures," Opt. Express 17, 20991-20997 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-23-20991


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References

  1. P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnology 8(2), 53–56 (1997). [CrossRef]
  2. K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO(2) films,” Opt. Lett. 26(21), 1642–1644 (2001). [CrossRef] [PubMed]
  3. Y. Kanamori, M. Ishimori, and K. Hane, “High efficient light-emitting diodes with antireflection subwavelength gratings,” IEEE Photon. Technol. Lett. 14(8), 1064–1066 (2002). [CrossRef]
  4. M. Ishimori, Y. Kanamori, M. Sasaki, and K. Hane, “Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching,” Jpn. J. Appl. Phys. 41(Part 1, No. 6B), 4346–4349 (2002). [CrossRef]
  5. Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003). [CrossRef]
  6. Y. M. Song, S. Y. Bae, J. S. Yu, and Y. T. Lee, “Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer,” Opt. Lett. 34(11), 1702–1704 (2009). [CrossRef] [PubMed]
  7. Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C. H. Hsu, Y. H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol. 2(12), 770–774 (2007). [CrossRef] [PubMed]
  8. P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolums,” Adv. Mater. 21(16), 1618–1621 (2009). [CrossRef]
  9. T. Lohmüller, M. Helgert, M. Sundermann, R. Brunner, and J. P. Spatz, “Biomimetic interfaces for high-performance optics in the deep-UV light range,” Nano Lett. 8(5), 1429–1433 (2008). [CrossRef] [PubMed]
  10. Y. Kojima and T. Kato, “Nanoparticle formation in Au thin films by electron-beam-induced dewetting,” Nanotechnology 19(25), 255605 (2008). [CrossRef] [PubMed]
  11. J.-M. Lee and B.-I. Kim, “Thermal dewetting of Pt thin film: Etch-masks for the fabrication of semiconductor nanostructures,” Mater. Sci. Eng. A 449–451, 769–773 (2007). [CrossRef]
  12. S. Wang, X. Z. Yu, and H. T. Fan, “Simple lithographic approach for subwavelength structure antireflection,” Appl. Phys. Lett. 91(6), 061105 (2007). [CrossRef]
  13. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981). [CrossRef]
  14. M. G. Moharam and T. K. Gaylord, “Three-dimensional vector coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 73(9), 1105–1112 (1983). [CrossRef]
  15. S. A. Boden and D. M. Bagnall, “Tunable reflection minima of nanostructured antireflective surfaces,” Appl. Phys. Lett. 93(13), 133108 (2008). [CrossRef]
  16. E. Hecht, Optic, 4th ed.(Addison Wesley, 2002), Chap. 10.
  17. E. S. Kooij, E. A. M. Brouwer, H. Wormeester, and B. Poelsema, “Ionic strength mediated self-organization of gold nanocrystals: An AFM study,” Langmuir 18(20), 7677–7682 (2002). [CrossRef]

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