Abstract

An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.

© 2009 Optical Society of America

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History
Original Manuscript: September 8, 2009
Manuscript Accepted: October 20, 2009
Revised Manuscript: October 19, 2009
Published: November 4, 2009

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Author Affiliations

Soohyun Kim

KAIST

Jeongho Ahn

Korea Advanced Inst of Science & Tech

Jong-Ahn Kim, Chu-Shik Kang, Jae-Wan Kim

KRISS

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