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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 21042–21049

High resolution interferometer with multiple-pass optical configuration

Jeongho Ahn, Jong-Ahn Kim, Chu-Shik Kang, Jae-Wan Kim, and Soohyun Kim  »View Author Affiliations


Optics Express, Vol. 17, Issue 23, pp. 21042-21049 (2009)
http://dx.doi.org/10.1364/OE.17.021042


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Abstract

An interferometer having resolution fourteen times higher than a conventional single-pass interferometer has been developed by creating multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, where its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated and is in picometer level. An experiment proves that the proposed interferometer has optical resolution of approximate 45 nm and its nonlinearity is about 0.5 nm in peak-to-valley value.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 8, 2009
Revised Manuscript: October 19, 2009
Manuscript Accepted: October 20, 2009
Published: November 4, 2009

Citation
Jeongho Ahn, Jong-Ahn Kim, Chu-Shik Kang, Jae-Wan Kim, and Soohyun Kim, "High resolution interferometer with multiple-pass optical configuration," Opt. Express 17, 21042-21049 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-23-21042


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