Spherically shaped micro-structured antireflective surfaces

doi:10.1364/OE.17.021590

Spherically shaped micro-structured antireflective surfaces

R. Bouffaron, L. Escoubas, V. Brissonneau, J. J. Simon, G. Berginc, Ph. Torchio, F. Flory, and Ph. Masclet »View Author Affiliations

Optics Express, Vol. 17, Issue 24, pp. 21590-21597 (2009)
http://dx.doi.org/10.1364/OE.17.021590

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Abstract

An antireflecting micro-structured interface, working in the resonance domain, and made from a bi-periodic array of semi-spherical hollowing-out in a silicon substrate is presented. Its parameters such as sphere radius and position of sphere centers from the surface are optimized numerically. A simple and robust process is described allowing such kind of antireflective surfaces to be fabricated for the infrared range. Spectral and angular reflectance measurement demonstrates the efficiency of the antireflective micro-structured interface which can easily be adapted for the visible range and for photovoltaic applications by a simple homothetic modification of the micro-structure typical dimensions.

OCIS Codes
(310.1210) Thin films : Antireflection coatings
(050.5298) Diffraction and gratings : Photonic crystals
(050.5745) Diffraction and gratings : Resonance domain
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: August 17, 2009
Revised Manuscript: September 16, 2009
Manuscript Accepted: October 8, 2009
Published: November 11, 2009

Citation
R. Bouffaron, L. Escoubas, V. Brissonneau, J. J. Simon, G. Berginc, Ph. Torchio, F. Flory, and Ph. Masclet, "Spherically shaped micro-structured antireflective surfaces," Opt. Express 17, 21590-21597 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-24-21590

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References

A. Gombert, B. Blasi, C. Buhler, P. Nitz, J. Mick, W. Hoßfeld, and M. Niggemann, “Some application cases and related manufacturing techniques for optically functional microstructures on large areas,” Opt. Eng. 43(11), 2525–2533 (2004). [CrossRef]
H. A. Macleod, Thin film optical filters (Institute of Physics Publishing, London, 1986).
J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree, “Toward perfect antireflection coatings: numerical investigation,” Appl. Opt. 41(16), 3075–3083 (2002). [CrossRef] [PubMed]
P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973). [CrossRef]
Y. Zhao, J. Wang, and G. Mao, “Colloidal subwavelength nanostructures for antireflection optical coatings,” Opt. Lett. 29, 993–1009 (1982).
H. Sai, H. Fujii, K. Arafune, Y. Ohshita, M. Yamaguchi, Y. Kanamori, and H. Yugami, “Antireflective subwavelength structures on crystalline Si fabricated directly formed anodic porous masks,” Opt. Lett. 29, 993–1009 (1982).
H. Xu, N. Lu, D. Qi, J. Hao, L. Gao, B. Zhang, and L. Chi, “Biomimetic antireflective Si nanopillar arrays,” Small 4(11), 1972–1975 (2008). [CrossRef] [PubMed]
Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003). [CrossRef]
Y. C. Chang, G. H. Mei, T. W. Chang, T. J. Wang, D. Z. Lin, and C. K. Lee, “Design and fabrication of a nanostructured surface combining antireflective and enhanced-hydrophobic effects,” Nanotechnology 18(28), 285303 (2007). [CrossRef]
M. Born, and E. Wolf, Principles of Optics (Pergamon, London, 1980), 705 – 708.
E. B. Grann, M. G. Varga, and D. A. Pommet, “Optimal design for antireflective tapered two-dimensional subwavelength grating structures,” J. Opt. Soc. Am. A 12(2), 333–339 (1995). [CrossRef]
R. Bouffaron, L. Escoubas, J. J. Simon, P. Torchio, F. Flory, G. Berginc, and P. Masclet, “Enhanced antireflecting properties of micro-structured top-flat pyramids,” Opt. Express 16(23), 19304–19309 (2008). [CrossRef] [PubMed]
L. Escoubas, J. J. Simon, M. Loli, G. Berginc, F. Flory, and H. Giovannini, “An antireflective silicon grating working in the resonance domain for the near infrared spectral region,” Opt. Commun. 226(1-6), 81–88 (2003). [CrossRef]
K. Busch and S. John, “Liquid-Crystal Photonic-Band-Gap Materials: The Tunable Electromagnetic Vacuum,” Phys. Rev. Lett. 83(5), 967–970 (1999). [CrossRef]

Appl. Opt.

J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree, “Toward perfect antireflection coatings: numerical investigation,” Appl. Opt. 41(16), 3075–3083 (2002). [CrossRef] [PubMed]

J. Opt. Soc. Am. A

E. B. Grann, M. G. Varga, and D. A. Pommet, “Optimal design for antireflective tapered two-dimensional subwavelength grating structures,” J. Opt. Soc. Am. A 12(2), 333–339 (1995). [CrossRef]

J. Vac. Sci. Technol. B

Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, “Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff,” J. Vac. Sci. Technol. B 21(6), 2874–2877 (2003). [CrossRef]

Nanotechnology

Y. C. Chang, G. H. Mei, T. W. Chang, T. J. Wang, D. Z. Lin, and C. K. Lee, “Design and fabrication of a nanostructured surface combining antireflective and enhanced-hydrophobic effects,” Nanotechnology 18(28), 285303 (2007). [CrossRef]

Nature

P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973). [CrossRef]

Opt. Commun.

L. Escoubas, J. J. Simon, M. Loli, G. Berginc, F. Flory, and H. Giovannini, “An antireflective silicon grating working in the resonance domain for the near infrared spectral region,” Opt. Commun. 226(1-6), 81–88 (2003). [CrossRef]

Opt. Eng.

A. Gombert, B. Blasi, C. Buhler, P. Nitz, J. Mick, W. Hoßfeld, and M. Niggemann, “Some application cases and related manufacturing techniques for optically functional microstructures on large areas,” Opt. Eng. 43(11), 2525–2533 (2004). [CrossRef]

Opt. Express

R. Bouffaron, L. Escoubas, J. J. Simon, P. Torchio, F. Flory, G. Berginc, and P. Masclet, “Enhanced antireflecting properties of micro-structured top-flat pyramids,” Opt. Express 16(23), 19304–19309 (2008). [CrossRef] [PubMed]

Opt. Lett.

Y. Zhao, J. Wang, and G. Mao, “Colloidal subwavelength nanostructures for antireflection optical coatings,” Opt. Lett. 29, 993–1009 (1982).
H. Sai, H. Fujii, K. Arafune, Y. Ohshita, M. Yamaguchi, Y. Kanamori, and H. Yugami, “Antireflective subwavelength structures on crystalline Si fabricated directly formed anodic porous masks,” Opt. Lett. 29, 993–1009 (1982).

Phys. Rev. Lett.

K. Busch and S. John, “Liquid-Crystal Photonic-Band-Gap Materials: The Tunable Electromagnetic Vacuum,” Phys. Rev. Lett. 83(5), 967–970 (1999). [CrossRef]

Small

H. Xu, N. Lu, D. Qi, J. Hao, L. Gao, B. Zhang, and L. Chi, “Biomimetic antireflective Si nanopillar arrays,” Small 4(11), 1972–1975 (2008). [CrossRef] [PubMed]

Other

H. A. Macleod, Thin film optical filters (Institute of Physics Publishing, London, 1986).
M. Born, and E. Wolf, Principles of Optics (Pergamon, London, 1980), 705 – 708.

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