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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 25 — Dec. 7, 2009
  • pp: 22543–22552

Thin film Ag superlens towards lab-on-a-chip integration

C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen  »View Author Affiliations


Optics Express, Vol. 17, Issue 25, pp. 22543-22552 (2009)
http://dx.doi.org/10.1364/OE.17.022543


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Abstract

A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.

© 2009 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(250.5403) Optoelectronics : Plasmonics

ToC Category:
Metamaterials

History
Original Manuscript: September 21, 2009
Revised Manuscript: November 21, 2009
Manuscript Accepted: November 23, 2009
Published: November 24, 2009

Virtual Issues
Vol. 5, Iss. 1 Virtual Journal for Biomedical Optics

Citation
C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen, "Thin film Ag superlens towards lab-on-a-chip integration," Opt. Express 17, 22543-22552 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-25-22543


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