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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 25 — Dec. 7, 2009
  • pp: 23025–23036

Photo-thermal measurement of absorptance losses, temperature induced wavefront deformation and compaction in DUV-optics

Bernd Schäfer, Jonas Gloger, Uwe Leinhos, and Klaus Mann  »View Author Affiliations

Optics Express, Vol. 17, Issue 25, pp. 23025-23036 (2009)

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A measurement system for quantitative registration of transient and irreversible lens effects in DUV optics induced by absorbed UV laser radiation was developed. It is based upon a strongly improved Hartmann-Shack wavefront sensor with an extreme sensitivity of ~λ/10000 rms @ 193nm, accomplishing precise on-line monitoring of wavefront deformations of a collimated test laser beam transmitted through the laser-irradiated site of a sample. Caused by the temperature dependence of the refractive index as well as thermal expansion, the initially plane wavefront of the test laser is distorted into a convex or concave lens, depending on sign and magnitude of index change and expansion. This transient wavefront distortion yields a quantitative measure of the absorption losses in the sample. In the case of fused silica, an additional permanent change indicates irreversible material compaction. Results for both fused silica and CaF2 are presented and compared.

© 2009 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 25, 2009
Revised Manuscript: November 11, 2009
Manuscript Accepted: November 11, 2009
Published: December 2, 2009

Bernd Schäfer, Jonas Gloger, Uwe Leinhos, and Klaus Mann, "Photo-thermal measurement of absorptance losses, temperature induced wavefront deformation and compaction in DUV-optics," Opt. Express 17, 23025-23036 (2009)

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