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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 26 — Dec. 21, 2009
  • pp: 23522–23529

Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes

D. Elfström, B. Guilhabert, J. McKendry, S. Poland, Z. Gong, D. Massoubre, E. Richardson, B. R. Rae, G. Valentine, G. Blanco-Gomez, E. Gu, J.M. Cooper, R.K. Henderson, and M.D. Dawson  »View Author Affiliations

Optics Express, Vol. 17, Issue 26, pp. 23522-23529 (2009)

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We report on an approach to ultraviolet (UV) photolithography and direct writing where both the exposure pattern and dose are determined by a complementary metal oxide semiconductor (CMOS) controlled micro-pixellated light emitting diode array. The 370nm UV light from a demonstrator 8 x 8 gallium nitride micro-pixel LED is projected onto photoresist covered substrates using two back-to-back microscope objectives, allowing controlled demagnification. In the present setup, the system is capable of delivering up to 8.8W/cm2 per imaged pixel in circular spots of diameter ~8µm. We show example structures written in positive as well as in negative photoresist.

© 2009 OSA

OCIS Codes
(110.3960) Imaging systems : Microlithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3670) Optical devices : Light-emitting diodes

ToC Category:
Imaging Systems

Original Manuscript: September 30, 2009
Manuscript Accepted: October 31, 2009
Published: December 8, 2009

D. Elfström, B. Guilhabert, J. McKendry, S. Poland, Z. Gong, D. Massoubre, E. Richardson, B. R. Rae, G. Valentine, G. Blanco-Gomez, E. Gu, J. M. Cooper, R. K. Henderson, and M. D. Dawson, "Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes," Opt. Express 17, 23522-23529 (2009)

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  1. S. P. A. Fodor, J. L. Read, M. C. Pirrung, L. Stryer, A. T. Lu, and D. Solas, “Light-directed, spatially addressable parallel chemical synthesis,” Science 251(4995), 767–773 (1991). [CrossRef] [PubMed]
  2. C. Rensch, S. Hell, M. Schickfus, and S. Hunklinger, “Laser scanner for direct writing lithography,” Appl. Opt. 28(17), 3754 (1989). [CrossRef] [PubMed]
  3. R. M. Guijt and M. C. Breadmore, “Maskless photolithography using UV LEDs,” Lab Chip 8(8), 1402–1404 (2008). [CrossRef] [PubMed]
  4. T. Naiser, T. Mai, W. Michel, and A. Ott, “Versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays,” Rev. Sci. Instrum. 77(6), 063711 (2006). [CrossRef]
  5. G. P. Watson, V. Aksyuk, M. E. Simon, D. M. Tennant, R. A. Cirelli, W. M. Mansfield, F. Pardo, D. O. Lopez, C. A. Bolle, A. R. Papazian, N. Basavanhally, J. Lee, R. Fullowan, F. Klemens, J. Miner, A. Kornblit, T. Sorsch, L. Fetter, M. Peabody, J. E. Bower, J. S. Weiner, and Y. L. Low, “Spatial light modulator for maskless optical projection lithography,” J. Vac. Sci. Technol. B 24(6), 2852 (2006). [CrossRef]
  6. C. W. Jeon, E. Gu, and M. D. Dawson, “Mask-free photolithographic exposure using a matrix-addressable micropixellated AlInGaN ultraviolet light-emitting diode,” Appl. Phys. Lett. 86(22), 221105 (2005). [CrossRef]
  7. H. X. Zhang, D. Massoubre, J. McKendry, Z. Gong, B. Guilhabert, C. Griffin, E. Gu, P. E. Jessop, J. M. Girkin, and M. D. Dawson, “Individually-addressable flip-chip AlInGaN micropixelated light emitting diode arrays with high continuous and nanosecond output power,” Opt. Express 16(13), 9918–9926 (2008). [CrossRef] [PubMed]
  8. J. McKendry, B. R. Rae, Z. Gong, K. R. Muir, B. Guilhabert, D. Massoubre, E. Gu, D. Renshaw, M. D. Dawson, and R. K. Henderson, “Individually-Addressable AlInGaN Micro-LED Arrays with CMOS Control and Sub-Nanosecond Output Pulses,” IEEE Photon. Technol. Lett. 21(12), 811–813 (2009). [CrossRef]
  9. A. Tan, K. Rodgers, J. P. Murrihy, C. O'Mathuna, and J. D. Glennon, “Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopyingPresented at the 14th International Symposium on Microscale Separations and Analysis, Boston, January 13-18, 2001,” Lab Chip 1(1), 7 (2001). [CrossRef] [PubMed]
  10. W. K. T. Coltro, E. Piccin, J. A. Fracassi da Silva, C. Lucio do Lago, and E. Carrilho, “A toner-mediated lithographic technology for rapid prototyping of glass microchannels,” Lab Chip 7(7), 931–934 (2007). [CrossRef] [PubMed]
  11. M. H. Sorouraddin, M. Amjadi, and M. Safi-Shalamzari, “Simple and rapid methods for the fabrication of polymeric and glass chips for using in analytical chemistry,” Anal. Chim. Acta 589(1), 84–88 (2007). [CrossRef] [PubMed]
  12. G. M. Atkinson, F. P. Stratton, R. L. Kubena, and J. C. Wolfe, “30 nm resolution zero proximity lithography on high-Z substrates,” J. Vac. Sci. Technol. B 10(6), 3104–3108 (1992). [CrossRef]
  13. T. A. Savas, M. L. Schattenburg, J. M. Carter, and I. Henry, “Smith, “Large-area achromatic interferometric lithography for 100 nm period gratings and grids,” J. Vac. Sci. Technol. B 14(6), 4167–4170 (1996). [CrossRef]
  14. T. Sandstrom, A. Bleeker, J. Hintersteiner, K. Troost, J. Freyer, and K. van der Mast, “OML: optical maskless lithography for economic design prototyping and small-volume production,” Proc. SPIE 5377, 777 (2004). [CrossRef]
  15. N. Choksi, D. S. Pickard, M. McCord, R. F. W. Pease, Y. Shroff, Y. Chen, W. Oldham, and D. Markle, “Maskless extreme ultraviolet lithography,” J. Vac. Sci. Technol. B 17(6), 3047–3051 (1999). [CrossRef]
  16. D. Gil, R. Menon, and H. I. Smith, “The case for diffractive optics in maskless lithography,” J. Vac. Sci. Technol. B 21(6), 2810–2814 (2003). [CrossRef]
  17. X. Sun, D. Yin, H. Dai, J. Liu, R. Lu, and S. T. Wu, “Intermittent curing and its effect on pulsed laser-induced photopolymerization,” Appl. Phys. B 92(1), 93–98 (2008). [CrossRef]
  18. H. Xu, J. Zhang, K. M. Davitt, Y.-K. Song, and A. V. Nurmikko, “Applications of blue-green and ultraviolet micro-LEDs to biological imaging and detection,” J. Phys. D Appl. Phys. 41(9), 094013 (2008). [CrossRef]

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