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Low-power, 2×2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks
Joris Van Campenhout, William M. Green, Solomon Assefa, and Yurii A. Vlasov »View Author Affiliations
Joris Van Campenhout,
William M. J. Green,
Solomon Assefa,
and Yurii A. Vlasov
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
*Corresponding author: jvancam@us.ibm.com
Optics Express, Vol. 17, Issue 26, pp. 24020-24029 (2009)
http://dx.doi.org/10.1364/OE.17.024020
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Abstract
We present an ultra-broadband Mach-Zehnder based optical switch in silicon, electrically driven through carrier injection. Crosstalk levels lower than -17dB are obtained for both the ‘on’ and ‘off’ switching states over an optical bandwidth of 110nm, owing to the implementation of broadband 50% couplers. Full 2×2 switching functionality is demonstrated, with low power consumption (~3mW) and a fast switching time (<4ns). The utilization of standard CMOS metallization results in a low drive voltage (~1V) and a record-low VπL (~0.06V·mm). The wide optical bandwidth is maintained for temperature variations up to 30K.
© 2009 Optical Society of America
OCIS Codes
(130.4815) Integrated optics : Optical switching devices
(250.6715) Optoelectronics : Switching
ToC Category:
Integrated Optics
History
Original Manuscript: November 10, 2009
Revised Manuscript: December 10, 2009
Manuscript Accepted: December 13, 2009
Published: December 16, 2009
Citation
Joris Van Campenhout, William M. Green, Solomon Assefa, and Yurii A. Vlasov, "Low-power, 2×2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks," Opt. Express 17, 24020-24029 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-26-24020
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References
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Ahn, J.
Asanovic, K.
Baets, R.
Barwicz, T.
Batten, C.
Beausoleil, R. G.
Beckx, S.
Benner, A. F.
Bennett, B. R.
Bergman, K.
Biberman, A.
Bienstman, P.
Binkert, N.
Bogaerts, W.
Byun, H.
Cabral, C.
Carloni, L. P.
Chen, Y. J.
Cohen, E.
Cunningham, J. E.
d’Heurle, F. M.
Davis, A.
Detavernier, C.
Di Cioccio, L.
Dong, P.
Dumon, P.
Fattal, D.
Fedeli, J. M.
Fiorentino, M.
Gan, F.
Geis, M.
Green, W. M. J.
Grein, M.
Guo, H. C.
Hamann, H. F.
Ho, R.
Holzwarth, C. W.
Hoyt, J. L.
Hu, Z. G.
Ignatowski, M.
Ippen, E. P.
Jaenen, P.
Jinguji, K.
Joshi, A.
Jouppi, N. P.
Kartner, F. X.
Kash, J. A.
Kawachi, M.
Khilo, A.
Kitoh, T.
Koka, P.
Krishnamoorthy, A. V.
Kuchta, D. M.
Lacey, J. A.
Lavoie, C.
Lee, B. G.
Lexau, J.
Li, G. L.
Li, H. Q.
Liang, T. K.
Lipson, M.
Lyszczarz, T.
McLaren, M.
Moss, B.
Nunes, L. R.
Olubuyide, O. O.
Orcutt, J.
Orcutt, J. S.
Popovic, M. A.
Priem, G.
Rakich, P. T.
Ram, R. J.
Regreny, P.
Ritter, M. B.
Rojo-Romeo, P.
Rooks, M.
Rooks, M. J.
Santori, C. M.
Schreiber, R. S.
Schwetman, H.
Seassal, C.
Sekaric, L.
Shacham, A.
Shubin, I.
Smith, H. I.
Soref, R. A.
Spector, S.
Spillane, S. M.
Stojanovic, V.
Sugita, A.
Takato, N.
Tsao, S. L.
Tsuchiya, M.
Van Campenhout, J.
Van Thourhout, D.
Vantrease, D.
Vlasov, Y.
Vlasov, Y. A.
Wakil, J.
Watts, M. R.
Weger, A.
Wouters, J.
Xia, F.
Xia, F. N.
Xu, Q.
Yasu, M.
Yoon, J. U.
Zheng, X. Z.
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- J. Van Campenhout, P. Rojo-Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J. M. Fedeli, and R. Baets, "Thermal characterization of electrically injected thin-film InGaAsP microdisk lasers on Si," J. Lightwave Technol. 25(6), 1543-1548 (2007). [CrossRef]
- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, "Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics," IEEE Micro 29(4), 8-21 (2009). [CrossRef]
- J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys. A 95(4), 989-997 (2009). [CrossRef]
- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
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- R. A. Soref and B. R. Bennett, "Electrooptical Effects in Silicon," IEEE J. Quantum Electron. 23(1), 123-129 (1987). [CrossRef]
- B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, "All-optical comb switch for multiwavelength message routing in silicon photonic networks," IEEE Photon. Technol. Lett. 20(9-12), 767-769 (2008). [CrossRef]
- A. Shacham, K. Bergman, and L. P. Carloni, "Photonic networks-on-chip for future generations of chip multiprocessors," IEEE Trans. Comput. 57(9), 1246-1260 (2008). [CrossRef]
- B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, "All-optical comb switch for multiwavelength message routing in silicon photonic networks," IEEE Photon. Technol. Lett. 20(9-12), 767-769 (2008). [CrossRef]
- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
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- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- C. Lavoie, F. M. d’Heurle, C. Detavernier, and C. Cabral, "Towards implementation of a nickel silicide process for CMOS technologies," Microelectron. Eng. 70(2-4), 144-157 (2003). [CrossRef]
- A. Shacham, K. Bergman, and L. P. Carloni, "Photonic networks-on-chip for future generations of chip multiprocessors," IEEE Trans. Comput. 57(9), 1246-1260 (2008). [CrossRef]
- S. L. Tsao, H. C. Guo, and Y. J. Chen, "Design of a 2 x 2 MMI MZI SOI electro-optic switch covering C band and L band," Microw. Opt. Technol. Lett. 33(4), 262-265 (2002). [CrossRef]
- H. F. Hamann, A. Weger, J. A. Lacey, Z. G. Hu, E. Cohen, and J. Wakil, "Hotspot-limited microprocessors: Direct temperature and power distribution measurements," IEEE J. Solid-State Circuits 42(1), 56-65 (2007). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Z. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, "Computer Systems Based on Silicon Photonic Interconnects," Proc. IEEE 97(7), 1337-1361 (2009). [CrossRef]
- C. Lavoie, F. M. d’Heurle, C. Detavernier, and C. Cabral, "Towards implementation of a nickel silicide process for CMOS technologies," Microelectron. Eng. 70(2-4), 144-157 (2003). [CrossRef]
- J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys. A 95(4), 989-997 (2009). [CrossRef]
- C. Lavoie, F. M. d’Heurle, C. Detavernier, and C. Cabral, "Towards implementation of a nickel silicide process for CMOS technologies," Microelectron. Eng. 70(2-4), 144-157 (2003). [CrossRef]
- B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, "All-optical comb switch for multiwavelength message routing in silicon photonic networks," IEEE Photon. Technol. Lett. 20(9-12), 767-769 (2008). [CrossRef]
- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
- J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys. A 95(4), 989-997 (2009). [CrossRef]
- J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys. A 95(4), 989-997 (2009). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nature Photon. 2(4), 242-246 (2008). [CrossRef]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15(25), 17,106-17,113 (2007).
- J. Van Campenhout, W. M. J. Green, and Y. A. Vlasov, "Design of a digital, utra-broadband optical switch for reconfigurable optical networks-on-chip," Opt. Express (to be published).
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- S. L. Tsao, H. C. Guo, and Y. J. Chen, "Design of a 2 x 2 MMI MZI SOI electro-optic switch covering C band and L band," Microw. Opt. Technol. Lett. 33(4), 262-265 (2002). [CrossRef]
- H. F. Hamann, A. Weger, J. A. Lacey, Z. G. Hu, E. Cohen, and J. Wakil, "Hotspot-limited microprocessors: Direct temperature and power distribution measurements," IEEE J. Solid-State Circuits 42(1), 56-65 (2007). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Z. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, "Computer Systems Based on Silicon Photonic Interconnects," Proc. IEEE 97(7), 1337-1361 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, "Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics," IEEE Micro 29(4), 8-21 (2009). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, "Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics," IEEE Micro 29(4), 8-21 (2009). [CrossRef]
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- H. F. Hamann, A. Weger, J. A. Lacey, Z. G. Hu, E. Cohen, and J. Wakil, "Hotspot-limited microprocessors: Direct temperature and power distribution measurements," IEEE J. Solid-State Circuits 42(1), 56-65 (2007). [CrossRef]
- A. F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, "Exploitation of optical interconnects in future server architectures," IBM J. Res. Dev. 49(4-5), 755-775 (2005). [CrossRef]
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- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
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Appl. Phys. A
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Electron. Lett.
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IBM J. Res. Dev.
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IEEE J. Quantum Electron.
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IEEE J. Solid-State Circuits
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IEEE Micro
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IEEE Photon. Technol. Lett.
- B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, "All-optical comb switch for multiwavelength message routing in silicon photonic networks," IEEE Photon. Technol. Lett. 20(9-12), 767-769 (2008). [CrossRef]
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IEEE Trans. Comput.
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J. Lightwave Technol.
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Jpn. J. Appl. Phys.
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Microelectron. Eng.
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Microw. Opt. Technol. Lett.
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Nature Photon.
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Opt. Express
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Proc. IEEE
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Other
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2009, Batten, IEEE Micro
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, "Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics," IEEE Micro 29(4), 8-21 (2009). [CrossRef]
- J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys. A 95(4), 989-997 (2009). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Z. Zheng, H. Schwetman, J. Lexau, P. Koka, G. L. Li, I. Shubin, and J. E. Cunningham, "Computer Systems Based on Silicon Photonic Interconnects," Proc. IEEE 97(7), 1337-1361 (2009). [CrossRef]
- A. Shacham, K. Bergman, and L. P. Carloni, "Photonic networks-on-chip for future generations of chip multiprocessors," IEEE Trans. Comput. 57(9), 1246-1260 (2008). [CrossRef]
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nature Photon. 2(4), 242-246 (2008). [CrossRef]
- B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, "All-optical comb switch for multiwavelength message routing in silicon photonic networks," IEEE Photon. Technol. Lett. 20(9-12), 767-769 (2008). [CrossRef]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15(25), 17,106-17,113 (2007).
- H. F. Hamann, A. Weger, J. A. Lacey, Z. G. Hu, E. Cohen, and J. Wakil, "Hotspot-limited microprocessors: Direct temperature and power distribution measurements," IEEE J. Solid-State Circuits 42(1), 56-65 (2007). [CrossRef]
- F. N. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, "Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects," Opt. Express 15(19), 11,934-11,941 (2007).
- T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, "Silicon photonics for compact, energy-efficient interconnects [Invited]," J. Opt. Netw. 6(1), 63-73 (2007). [CrossRef]
- P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, "Linear and nonlinear nanophotonic devices based on silicon-oninsulator wire waveguides," Jpn. J. Appl. Phys. 45(8B), 6589-6602 (2006). [CrossRef]
- A. F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, "Exploitation of optical interconnects in future server architectures," IBM J. Res. Dev. 49(4-5), 755-775 (2005). [CrossRef]
- C. Lavoie, F. M. d’Heurle, C. Detavernier, and C. Cabral, "Towards implementation of a nickel silicide process for CMOS technologies," Microelectron. Eng. 70(2-4), 144-157 (2003). [CrossRef]
- S. L. Tsao, H. C. Guo, and Y. J. Chen, "Design of a 2 x 2 MMI MZI SOI electro-optic switch covering C band and L band," Microw. Opt. Technol. Lett. 33(4), 262-265 (2002). [CrossRef]
- T. Kitoh, N. Takato, K. Jinguji, M. Yasu, and M. Kawachi, "Novel Broad-Band Optical Switch Using Silica-Based Planar Lightwave Circuit," IEEE Photon. Technol. Lett. 4(7), 735-737 (1992). [CrossRef]
- K. Jinguji, N. Takato, A. Sugita, and M. Kawachi, "Mach-Zehnder Interferometer Type Optical Wave-Guide Coupler with Wavelength-Flattened Coupling Ratio," Electron. Lett. 26(17), 1326-1327 (1990). [CrossRef]
- R. A. Soref and B. R. Bennett, "Electrooptical Effects in Silicon," IEEE J. Quantum Electron. 23(1), 123-129 (1987). [CrossRef]
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