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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 26 — Dec. 21, 2009
  • pp: 24334–24341

Encapsulated subwavelength grating as a quasi-monolithic resonant reflector

Frank Brückner, Daniel Friedrich, Michael Britzger, Tina Clausnitzer, Oliver Burmeister, Ernst-Bernhard Kley, Karsten Danzmann, Andreas Tünnermann, and Roman Schnabel  »View Author Affiliations

Optics Express, Vol. 17, Issue 26, pp. 24334-24341 (2009)

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For a variety of laser interferometric experiments, the thermal noise of high-reflectivity multilayer dielectric coatings limits the measurement sensitivity. Recently, monolithic high-reflection waveguide mirrors with nanostructured surfaces have been proposed to reduce the thermal noise in interferometric measurements. Drawbacks of this approach are a highly complicated fabrication process and the high susceptibility of the nanostructured surfaces to damage and pollution. Here, we propose and demonstrate a novel quasi-monolithic resonant surface reflector that also avoids the thick dielectric stack of conventional mirrors but has a flat and robust surface. Our reflector is an encapsulated subwavelength grating that is based on silicon. We measured a high reflectivity of 93% for a wavelength of λ=1.55 µm under normal incidence. Perfect reflectivities are possible in theory.

© 2009 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

Original Manuscript: November 23, 2009
Revised Manuscript: December 16, 2009
Manuscript Accepted: December 17, 2009
Published: December 18, 2009

Frank Brückner, Daniel Friedrich, Michael Britzger, Tina Clausnitzer, Oliver Burmeister, Ernst-Bernhard Kley, Karsten Danzmann, Andreas Tünnermann, and Roman Schnabel, "Encapsulated subwavelength grating as a quasi-monolithic resonant reflector," Opt. Express 17, 24334-24341 (2009)

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Fig. 1. Fig. 2. Fig. 3.

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