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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 3 — Feb. 2, 2009
  • pp: 1442–1446

High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity

Chu-Shik Kang, Jong-Ahn Kim, Tae Bong Eom, Roma Jang, Hae Yong Park, and Jae Wan Kim  »View Author Affiliations

Optics Express, Vol. 17, Issue 3, pp. 1442-1446 (2009)

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We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carré algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640×480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms).

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(140.3520) Lasers and laser optics : Lasers, injection-locked

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 9, 2008
Revised Manuscript: January 16, 2009
Manuscript Accepted: January 18, 2009
Published: January 23, 2009

Chu-Shik Kang, Jong-Ahn Kim, Tae Bong Eom, Roma Jang, Hae Yong Park, and Jae-Wan Kim, "High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity," Opt. Express 17, 1442-1446 (2009)

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Fig. 1. Fig. 2. Fig. 3.

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