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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 3 — Feb. 2, 2009
  • pp: 1527–1534

Slot waveguides with polycrystalline silicon for electrical injection

Kyle Preston and Michal Lipson  »View Author Affiliations

Optics Express, Vol. 17, Issue 3, pp. 1527-1534 (2009)

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We demonstrate horizontal slot waveguides using high-index layers of polycrystalline and single crystalline silicon separated by a 10 nm layer of silicon dioxide. We measure waveguide propagation loss of 7 dB/cm and a ring resonator intrinsic quality factor of 83,000. The electric field of the optical mode is strongly enhanced in the low-index oxide layer, which can be used to induce a strong modal gain when an active material is embedded in the slot. Both high-index layers are made of electrically conductive silicon which can efficiently transport charge to the slot region. The incorporation of conductive silicon materials with high-Q slot waveguide cavities is a key step for realizing electrical tunneling devices such as electrically pumped silicon-based light sources.

© 2009 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: November 26, 2008
Revised Manuscript: January 16, 2009
Manuscript Accepted: January 20, 2009
Published: January 26, 2009

Kyle Preston and Michal Lipson, "Slot waveguides with polycrystalline silicon for electrical injection," Opt. Express 17, 1527-1534 (2009)

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