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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 4 — Feb. 16, 2009
  • pp: 2611–2622

Laser Doppler distance sensor using phase evaluation

P. Günther, T. Pfister, L. Büttner, and J. Czarske  »View Author Affiliations

Optics Express, Vol. 17, Issue 4, pp. 2611-2622 (2009)

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This paper presents a novel optical sensor which allows simultaneous measurements of axial position and tangential velocity of moving solid state objects. An extended laser Doppler velocimeter setup is used with two slightly tilted interference fringe systems. The distance to a solid state surface can be determined via a phase evaluation. The phase laser Doppler distance sensor offers a distance resolution of 150 nm and a total position uncertainty below 1 μm. Compared to conventional measurement techniques, such as triangulation, the distance resolution is independent of the lateral surface velocity. This advantage enables precise distance and shape measurements of fast rotating surfaces.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(280.3340) Remote sensing and sensors : Laser Doppler velocimetry
(150.5495) Machine vision : Process monitoring and control

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 2, 2008
Revised Manuscript: January 12, 2009
Manuscript Accepted: January 12, 2009
Published: February 6, 2009

P. Günther, T. Pfister, L. Büttner, and J. Czarske, "Laser Doppler distance sensor using phase evaluation," Opt. Express 17, 2611-2622 (2009)

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