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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 5 — Mar. 2, 2009
  • pp: 3362–3369

Fabrication of periodic nanovein structures by holography lithography technique

Ngoc Diep Lai, Yu Di Huang, Jian Hung Lin, Danh Bich Do, and Chia Chen Hsu  »View Author Affiliations


Optics Express, Vol. 17, Issue 5, pp. 3362-3369 (2009)
http://dx.doi.org/10.1364/OE.17.003362


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Abstract

This work demonstrates a promising method to fabricate periodic nanovein structures, which can be served as templates for fabricating photonic crystals possessing a large complete photonic bandgap. First, the fabrication of a one-dimensional grating structure connected with nanolines is demonstrated by controlling the exposure dosage of the second exposure of the two-exposure two-beam interference technique. Secondly, by using the same interference technique but setting each exposure under the same exposure dosage, two-dimensional periodic structures with nanovein connections were fabricated. These structures were obtained by using either a pure negative photoresist with very low concentration of photoinitiator or a mixing of a negative and a positive photoresists. The fabricated structures are not, as usual, a duplication of the interference pattern but are constituted by square or triangular rods connecting with narrow veins. They can be used as templates for fabricating photonic crystals with very large complete photonic bandgap.

© 2009 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference

ToC Category:
Holography

History
Original Manuscript: December 17, 2008
Revised Manuscript: February 13, 2009
Manuscript Accepted: February 15, 2009
Published: February 18, 2009

Citation
Ngoc Diep Lai, Yu Di Huang, Jian Hung Lin, Danh Bich Do, and Chia Chen Hsu, "Fabrication of periodic nanovein structures by holography lithography technique," Opt. Express 17, 3362-3369 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-5-3362


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