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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 5 — Mar. 2, 2009
  • pp: 3370–3380

MEMS micromirror characterization in space environments

Byung-Wook Yoo, Jae-Hyoung Park, I. H. Park, Jik Lee, Minsoo Kim, Joo-Young Jin, Jin-A Jeon, Sug-Whan Kim, and Yong-Kweon Kim  »View Author Affiliations


Optics Express, Vol. 17, Issue 5, pp. 3370-3380 (2009)
http://dx.doi.org/10.1364/OE.17.003370


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Abstract

This paper describes MEMS micromirror characterization in space environments associated with our space applications in earth observation from the International Space Station and earth’s orbit satellite. The performance of the micromirror was tested for shock and vibration, stiction, outgassing from depressurization and heating, and electrostatic charging effects. We demonstrated that there is no degradation of the micromirror performance after the space environment tests. A test bed instrument equipped with the micromirrors was delivered and tested in the ISS. The results demonstrate that the proposed micromirrors are suitable for optical space systems.

© 2009 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors
(120.6085) Instrumentation, measurement, and metrology : Space instrumentation

ToC Category:
Optical Devices

History
Original Manuscript: December 1, 2008
Revised Manuscript: February 15, 2009
Manuscript Accepted: February 16, 2009
Published: February 19, 2009

Citation
Byung-Wook Yoo, Jae-Hyoung Park, I. H. Park, Jik Lee, Minsoo Kim, Joo-Young Jin, Jin-A Jeon, Sug-Whan Kim, and Yong-Kweon Kim, "MEMS micromirror characterization in space environments," Opt. Express 17, 3370-3380 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-5-3370


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References

  1. P. F. V. Kessel, L. J. Hornbeck, R. E. Meier, and M. R. Douglass, "A MEMS-based projection display," inProceedings of IEEE Special Issue: Integrated Sensors, Microactuators, and Microsystems(MEMS) 86, 1687-1704 (1998).
  2. R. S. Muller and K. Y. Lau, "Surface-micromachined microoptical elements and systems," inProceedings of IEEE Special Issue: Integrated Sensors, Microactuators, and Microsystems(MEMS) 86, 1705-1720 (1998).
  3. A. S. Kutyrev, R. Arendt, S. H. Moseley, R. A. Boucarut, T. Hadjimichael, M. Jhabvala, T. King, M. J. Li, J. Loughlin, D. Rapchun, D. S. Schwinger, and R. F. Silverberg, "Programmable microshutter arrays for the JWST NIRSpec: optical performance," IEEE J. Sel. Top. Quantum Electron. 10, 652-661 (2004). [CrossRef]
  4. S. Waldis, P. Ayyalasomayajula, W. Noell, and N. F. dep Rooij, "Micromirrors for multiobject spectroscopy: Large array actuation and cryogenic compatibility," in Proceedings of IEEE Int. Conf. Optical MEMS and Nanophotonics, (Huwalian, Taiwan, 2007), pp. 87-88. [CrossRef]
  5. J. Porter, H. Queener, J. Lin, K. Thor, and A. Awwal, Adaptive Optics for Vision Science (Wiley-Interscience, 2006), Chap. 4. [CrossRef]
  6. T. G. Bifano, J. Perreault, R. Krishnamoorthy-Mali, and M. N. Horenstein, "Microelectromechanical Deformable Mirrors," IEEE J. Sel. Top. Quantum Electron. 5, 83-90 (1999). [CrossRef]
  7. D. Content, S. Antonille, D. Rabin, T. Wallace, "Sounding-rocket telescope uses new technology ultra-light-weight mirrors," (SPIE newsroom, 2006), http://spie.org/documents/Newsroom/Imported/260/2006070260.pdf.
  8. J. A. Perreault, T. G. Bifano, B. M. Levine, and M. N. Horenstein, "Adaptive optics correction using microelectromechanical deformable mirrors," Opt. Eng. 41, 561-566 (2002). [CrossRef]
  9. L. Muller, M. H. Hecht, L. M. Miller, H. K. Rockstad, and J. C. Lyke, "Packaging and qualification of MEMS-based space systems," Proc. MEMS, (Atlanta, USA, 1996), pp. 503-508.
  10. M. Griffin, B. Swinyard, and L. Vigroux, "SPIRE - Herschel’s submillimetre camera and spectrometer," Proc. SPIE 4850, 686-697 (2002). [CrossRef]
  11. T. George, "MEMS/NEMS development for Space Applications at NASA/JPL," Proc. SPIE 4755, 556-567, (2002). [CrossRef]
  12. L. M. Miller, "MEMS for space applications," Symp. on design, test and microfabrication of MEMS/MOEMS, (Paris, France, 1996), pp. 1-11.
  13. B. Stark, "MEMS reliability assurance guidelines for space applications," in JPL publication 99-1 (1999).
  14. Y. H. Jang, K. N. Lee, and Y. K. Kim, "Characterization of a single crystal silicon micromirror array for maskless UV lithography in biochip applications," J. Micromech. Microeng. 16, 2360-2368 (2006). [CrossRef]
  15. B. W. Yoo, J. H. Park, Y. H. Jang, and Y. K. Kim, "A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields," J. Micromech. Microeng. 18, 035031 (2008). [CrossRef]
  16. S. Nam, S. Artikova, T. Chung, G. Garipov, J. A. Jeon, S. Jeong, J. Y. Jin, B. A. Khrenov, J. E. Kim, M. Kim, Y. K. Kim, P. Klimov, J. Lee, H. Y. Lee, G. W. Na, S. J. Oh, M. Panasyuk, I. H. Park, J. H. Park, Y.-S. Park, B. W. Yoo, and H. J. Yoo, "A telescope for observation from space of extreme lightning in the upper atmosphere," Nucl. Instr. and Meth. A 588, 197-200 (2008). [CrossRef]
  17. S. J. Cunnigham, D. G. McIntyre, J. S. Carper, P. D. Jaramillo, and W. Tang, "Microstructures designed for shock robustness," Proc. SPIE 2880, 99-107 (1996).
  18. T. G. Brown and B. Davis, "Dynamic high-g loading of MEMS Sensors: ground and flight testing," Proc. SPIE 3512, 228-235 (1998). [CrossRef]
  19. D. M. Tanner, J. A. Walraven, K. Helgesen, L. W. Irwin, F. Brown, N. F. Smith, and N. Masters, "MEMS reliability in shock environments," in Proceedings of IRPS, (San Jose, USA, 2000), pp. 129-138.
  20. C. Shepherd, M. Zalalutdinov, T. Alan, H. Craighead, A. Zehnder, and J. Parpia, "Fracture strength of single crystal silicon at micron dimensions," (Department of Physics, University of Florida, 2003), http://www.hgc.cornell.edu/Nems%20Folder/fracture%20paper.pdf.
  21. A. N. Perminov, For the space mission of a space flight participant to the Russian segment of the International Space Station (ISS) Description of ISS RS and general technical requirements (Russian Federal Space Agency, 2007), Appendix I. [PubMed]
  22. J. A. Walraven, "Failure mechanism in MEMS," in Proceedings of ITC international test conference, (Charlotte, NC, 2003), pp. 808-833.
  23. W. M. van Spengen, R. Pures, and I. De Wolf, "A physical model to predict stiction in MEMS," J. Micromech. Microeng. 12, 702-713 (2002). [CrossRef]
  24. D. M. Tanner, "The effect of humidity on the reliability of a surface micromachined microengine," in Proceedings of IRPS, (San Diego, Calif., 1999), pp. 189-197.
  25. W. M. van Spengen, "MEMS reliability from a failure mechanisms perspective," Microelectronics Reliability 43, 1049-1060 (2003). [CrossRef]
  26. H. R. Shea, "Reliability of MEMS for space applications," Proc. SPIE 6111, 61110A (2006). [CrossRef]
  27. J. A. Wibbeler, G. Pfeifer, M. Hietschold, "Parasitic charging of dielectric surfaces in microelectromechanical systems (MEMS)," Sens. Actuators A 71, 74-80 (1998). [CrossRef]
  28. J. R. Wertz, Space Mission Analysis and Design, W. J. Larson, ed., (Kluwer Academic Publishers, 1991), pp. 183-193.
  29. NASA, "International Space Station, expedition 16," http://www.nasa.gov/mission_pages/station/expeditions/expedition16/index.html.

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