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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 5 — Mar. 2, 2009
  • pp: 3531–3542

Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian  »View Author Affiliations

Optics Express, Vol. 17, Issue 5, pp. 3531-3542 (2009)

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Femtosecond laser processing of bulk transparent materials can generate localized positive changes of the refractive index. Thus, by translation of the laser spot, light-guiding structures are achievable in three dimensions. Increasing the number of laser processing spots can consequently reduce the machining effort. In this paper, we report on a procedure of dynamic ultrafast laser beam spatial tailoring for parallel photoinscription of photonic functions. Multispot operation is achieved by spatially modulating the wavefront of the beam with a time-evolutive periodical binary phase mask. The parallel longitudinal writing of multiple waveguides is demonstrated in fused silica. Using this technique, light dividers in three dimensions and wavelength-division demultiplexing (WDD) devices relying on evanescent wave coupling are demonstrated.

© 2009 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(140.3390) Lasers and laser optics : Laser materials processing
(230.7370) Optical devices : Waveguides

ToC Category:
Laser Micromachining

Original Manuscript: December 1, 2008
Revised Manuscript: January 12, 2009
Manuscript Accepted: January 13, 2009
Published: February 23, 2009

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, "Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials," Opt. Express 17, 3531-3542 (2009)

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  1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-1731 (1996). [CrossRef] [PubMed]
  2. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, "Three-dimensional optical storage inside transparent materials," Opt. Lett. 21, 2023-2025 (1996). [CrossRef] [PubMed]
  3. K. Itoh, W. Watanabe, S. Nolte, and C. Schaffer, "Ultrafast processes for bulk modification of transparent materials," MRS Bull. 31,620-625 (2006). [CrossRef]
  4. A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, "Flipping the sign of refractive index changes in ultrafast and temporally shaped laser-irradiated borosilicate crown optical glass at high repetition rates," Phys. Rev. B 77, 104205/1-8 (2008). [CrossRef]
  5. D. Wortmann, M. Ramme, and J. Gottmann, "Refractive index modification using fs-laser double pulses," Opt. Express 15, 10149-10153 (2007). [CrossRef] [PubMed]
  6. E. Bricchi, B. G. Klappauf, and P. G. Kazansky, "Form birefringence and negative index change created by femtosecond direct writing in transparent materials," Opt. Lett. 29, 119-121 (2004). [CrossRef] [PubMed]
  7. Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Florea, and K. A. Winick, "Optical waveguide amplifier in Nddoped glass written with near-IR femtosecond laser pulses," Electron. Lett. 36, 226-227 (2000). [CrossRef]
  8. S. Campbell, R. R. Thomson, D. P. Hand, A. K. Kar, D. T. Reid, C. Canalias, V. Pasiskevicius, and F. Laurell, "Frequency-doubling in femtosecond laser inscribed periodically-poled potassium titanyl phosphate waveguides," Opt. Express 15, 17146-17150 (2007). [CrossRef] [PubMed]
  9. G. Della Valle, S. Taccheo, R. Osellame, A. Festa, G. Cerullo, and P. Laporta, "1.5 μm single longitudinal mode waveguide laser fabricated by femtosecond laser writing," Opt. Express 15, 3190-3194 (2007). [CrossRef] [PubMed]
  10. S. M. Eaton, H. Zhang, M. L. Ng, J. Li,W. Chen, S. Ho, and P. R. Herman, "Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides," Opt. Express 16, 9443-9458 (2008). [CrossRef] [PubMed]
  11. D. J. Little, M. Ams, P. Dekker, G. D. Marshall, J. M. Dawes, and M. J. Withford,"Femtosecond laser modification of fused silica: the effect of writing polarization on Si-O ring structure," Opt. Express 16, 20029-20037 (2008). [CrossRef] [PubMed]
  12. H. Zhang, S. M. Eaton, and P. R. Herman, "Low-loss Type II waveguide writing in fused silica with single picosecond laser pulses," Opt. Express 14, 4826-4834 (2006). [CrossRef] [PubMed]
  13. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama,"Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser," Opt. Lett. 28, 55-57 (2003). [CrossRef] [PubMed]
  14. R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo,"Femtosecond writing of active optical waveguides with astigmatically shaped beams," J. Opt. Soc. Am. B 20, 1559-1567 (2003). [CrossRef]
  15. C. Mauclair, A. Mermillod-Blondin, N. Huot, E. Audouard, and R. Stoian, "Ultrafast laser writing of homogeneous longitudinal waveguides in glasses using dynamic wavefront correction," Opt. Express 16, 5481-5492 (2008). [CrossRef] [PubMed]
  16. A. Mermillod-Blondin, C. Mauclair, A. Rosenfeld, J. Bonse, I. V. Hertel, E. Audouard, and R. Stoian, "Size correction in ultrafast laser processing of fused silica by temporal pulse shaping," Appl. Phys. Lett. 93, 021921-021924 (2008). [CrossRef]
  17. S. Li, G. Yu, C. Zheng, and Q. Tan, "Quasi-Dammann grating with proportional intensity array spots," Opt. Lett. 33, 2023-2025 (2008). [CrossRef] [PubMed]
  18. S. Hasegawa, Y. Hayasaki, and N. Nishida, "Holographic femtosecond laser processing with multiplexed phase Fresnel lenses," Opt. Lett. 31, 1705-1707 (2006). [CrossRef] [PubMed]
  19. J. W. Goodman, Introduction to Fourier Optics (2nd ed. McGraw-Hill, Singapore, 1996).
  20. C. Yu, J. Park, J. Kim, M. Jung, and S. Lee, "Design of Binary Diffraction Gratings of Liquid Crystals in a Linearly Graded Phase Model," Appl. Opt. 43, 1783-1788 (2004). [CrossRef] [PubMed]
  21. R. Graf, A. Fernandez, M. Dubov, H. J. Brueckner, B. N. Chichkov, and A. Apolonski, "Pearl-chain waveguides written at megahertz repetition rate," Appl. Phys. B 87, 21-27 (2007). [CrossRef]
  22. N. Sanner, N. Huot, E. Audouard, C. Larat, J.-P. Huignard, and B. Loiseaux, "Programmable focal spot shaping of amplified femtosecond laser pulses," Opt. Lett. 30, 1479-1481 (2005). [CrossRef] [PubMed]
  23. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "High-resolution study of photoinduced modification in fused silica produced by a tightly focused femtosecond laser beam in the presence of aberrations," J. Appl. Phys. 98, 013517/1-5 (2005). [CrossRef]
  24. Z. Wang, K. Sugioka, Y. Hanada, and K. Midorikawa, "Optical waveguide fabrication and integration with a micro-mirror inside photosensitive glass by femtosecond laser direct writing," Appl. Phys. A 88, 699-704 (2007). [CrossRef]
  25. D. Christodoulides, N. Demetrios, F. Lederer, and Y. Silberberg, " Discretizing light behaviour in linear and nonlinear waveguide lattices," Nature (London) 424, 817-823 (2003). [CrossRef]
  26. T. Pertsch, P. Dannberg, W. Elflein, A. Br¨auer, and F. Lederer, "Optical Bloch Oscillations in Temperature Tuned Waveguide Arrays," Phys. Rev. Lett. 83, 4752-4755 (1999). [CrossRef]
  27. A. Szameit, F. Dreisow, H. Hartung, S. Nolte, A. Tuennermann, and F. Lederer "Quasi-incoherent propagation in waveguide arrays," Appl. Phys. Lett. 90, 241113-241116 (2007). [CrossRef]
  28. A. Szameit, D. Bloemer, J. Burghoff, T. Schreiber, T. Pertsch, S. Nolte, A. Tuennermann, and F. Lederer, "Discrete Nonlinear Localization in Femtosecond Laser Written Waveguides in Fused Silica," Opt. Express 13, 10552-10557 (2005). [CrossRef] [PubMed]
  29. A. Yariv, Optical Electronics (4th ed. Saunders College Publ., 1991).
  30. A. Szameit, F. Dreisow, T. Pertsch, S. Nolte, and A. Tuennermann, "Control of directional evanescent coupling in fs laser written waveguides,". Opt. Express 15, 1579-1587 (2007), [CrossRef] [PubMed]
  31. A. W. Snyder, "Coupled mode theory for optical fibers," J. Opt. Soc. Am. 62, 1267-1277 (1972). [CrossRef]
  32. P. D. McIntyre, and A. W. Snyder, "Power transfer between nonparallel and tapered optical fibers," J. Opt. Soc. Am. 64, 286-288 (1974). [CrossRef]
  33. A. Szameit, D. Bloemer, J. Burghoff, T. Pertsch, S. Nolte, and A. Tuennermann, "Hexagonal waveguide arrays written with fs-laser pulses," Appl. Phys. B 82, 507-512 (2006). [CrossRef]

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