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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 6 — Mar. 16, 2009
  • pp: 4367–4381

Optical sensitivity analysis of deformed mirrors for microcantilever array IR imaging

Haitao Shi, Qingchuan Zhang, Jian Qian, Liang Mao, Teng Cheng, Jie Gao, Xiaoping Wu, Dapeng Chen, and Binbin Jiao  »View Author Affiliations

Optics Express, Vol. 17, Issue 6, pp. 4367-4381 (2009)

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Optical sensitivity is a major issue to improve the sensor responsivity and the spatial resolution of uncooled optomechanical focal plane arrays (FPA). The optical sensitivity is closely related to the mirror length and the undesired mirror deformation induced from the imbalanced residual stresses in different layers. In this paper, the influences of mirror length and deformation on the optical sensitivity are discussed by Fourier Optics. Theoretical analysis and experiments demonstrate that the optical sensitivity is seriously degraded by undesired mirror deformation, and that there exists an optimal mirror length which makes the optical sensitivity achieve its maximum under a certain mirror deformation. Based on the results, an optimized mirror configuration is presented to increase the optical sensitivity of substrate-free bi-material microcantilever array (SFBMA).

© 2009 Optical Society of America

OCIS Codes
(070.6110) Fourier optics and signal processing : Spatial filtering
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(230.4685) Optical devices : Optical microelectromechanical devices
(040.6808) Detectors : Thermal (uncooled) IR detectors, arrays and imaging

ToC Category:
Optical Devices

Original Manuscript: November 18, 2008
Revised Manuscript: February 20, 2009
Manuscript Accepted: February 21, 2009
Published: March 4, 2009

Haitao Shi, Qingchuan Zhang, Jian Qian, Liang Mao, Teng Cheng, Jie Gao, Xiaoping Wu, Dapeng Chen, and Binbin Jiao, "Optical sensitivity analysis of deformed mirrors for microcantilever array IR imaging," Opt. Express 17, 4367-4381 (2009)

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