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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 6 — Mar. 16, 2009
  • pp: 4495–4499

White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting

Maitreyee Roy, Joanna Schmit, and Parameswaran Hariharan  »View Author Affiliations


Optics Express, Vol. 17, Issue 6, pp. 4495-4499 (2009)
http://dx.doi.org/10.1364/OE.17.004495


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Abstract

A common problem when profiling surfaces with steps or discontinuities using white-light (coherence-probe) interferometry is localized spikes (batwings) or spurious peaks due to diffraction effects. We show that errors due to these effects can be minimized by processing the irradiance data obtained with an achromatic phase-shifter operating on the geometric (Pancharatnam) phase to yield the values of the surface height.

© 2009 Optical Society of America

OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy
(350.1370) Other areas of optics : Berry's phase
(180.1655) Microscopy : Coherence tomography

ToC Category:
Microscopy

History
Original Manuscript: January 9, 2009
Revised Manuscript: February 18, 2009
Manuscript Accepted: February 22, 2009
Published: March 5, 2009

Citation
Maitreyee Roy, Joanna Schmit, and Parameswaran Hariharan, "White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting," Opt. Express 17, 4495-4499 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-6-4495


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References

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