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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 6 — Mar. 16, 2009
  • pp: 4646–4651

Broadband antireflective poly-Si nanosponge for thin film solar cells

J. Y. Chyan, W. C. Hsu, and J. A. Yeh  »View Author Affiliations

Optics Express, Vol. 17, Issue 6, pp. 4646-4651 (2009)

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Antireflective nanosponges are fabricated on poly crystalline silicon (poly-Si) thin films using Ag-nanoparticles (NPs) assisted etching. Crystal orientations and grain sizes of the poly-Si thin films are investigated for the poly-Si nanosponge formation and the resultant optical properties. The Ag-NPs assisted etching preferentially etches the poly-Si thin films along crystal orientation of [110]. A 400 nm thick poly-Si nanosponge reduces effective optical reflection of the poly-Si thin film with substrate crystal orientation of (110) and averaged grain size of 250 nm from 26 % to 3 % at the wavelengths ranging from 400 nm to 1000 nm. Carrier lifetimes were found to be 41 and 36 μs for poly-Si thin film and RTO-passivated nanosponges, respectively.

© 2009 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(350.6050) Other areas of optics : Solar energy
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Thin Films

Original Manuscript: January 22, 2009
Revised Manuscript: March 5, 2009
Manuscript Accepted: March 5, 2009
Published: March 9, 2009

J. Y. Chyan, W. C. Hsu, and J. A. Yeh, "Broadband antireflective poly-Si nanosponge for thin film solar cells," Opt. Express 17, 4646-4651 (2009)

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  1. M. S. Mason, C. E. Richarson, H. A. Atwar, and R. K. Ahrenkiel, "Microsecond minority carrier lifetimes in HWCVD-grown films and implications for thin film solar cells," Thin Solid Film 501, 288-290 (2006). [CrossRef]
  2. I. Gordon, L. Carnel, D. Van Gestel, G. Beaucarne, and J. Poortmans, "8% Efficient thin-film polycrystalline-silicon solar cells based on aluminum- induced crystallization and thermal CVD," Prog. Photovol: Res. Appl. 15, 575-586 (2007). [CrossRef]
  3. S. Fahr, C. Ulbrich, T. Kirchartz, U. Rau, C. Rockstuhl, and F. Lederer, "Rugate filter for light trapping in solar cells," Opt. Express 16, 9332-9343 (2008). [CrossRef] [PubMed]
  4. M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Paxon, J. K. Kim, and E. F. Schubert, "Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm," Opt. Express 16, 5290-5298 (2008). [CrossRef] [PubMed]
  5. M. Lipinski, A. Kaminski, J.-F. Lellevre, M. Lemiti, E. Fourmond, and P. Zieba," Investigation of graded index SiOxNy antireflection coating for silicon solar cell manufacturing," Phys. Status Solidi C 4, 1566-1569 (2007). [CrossRef]
  6. C. N. Chen, J. Y. Chyan, C. M. Hsieh, and J. A. Yeh, "Nanoparticle-embedded actuator based on localized surface plasmon resonance," J. Opt. A: Pure Appl. Opt. 10044007-1-5 (2008). [CrossRef]
  7. Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, "Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures," Nature Nanotech. 2, 770-774 (2007). [CrossRef]
  8. J. -Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, "Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection," Nature Photon. 1, 176-179 (2007).
  9. W. Joo, M. S. Park, and J. K. Kim, "Block copolymer film with sponge-like nanoporous strucutre for antireflection coating," Langmuir 22, 7960-7963 (2006). [CrossRef] [PubMed]
  10. K. Q. Peng, J. Hu, Y, Yan, Y. Wu, H. Fang, Y. Xu, S. Lee, and J. Zhu, "Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles," Adv. Funct. Mater. 16, 387-394 (2006). [CrossRef]
  11. S. Yae, T. Kobayashi, T. Kawagishi, N. Fukumuro, and H. Matsuda, "Antireflective porous layer formation on multicrystalline silicon by metal particle enhanced HF etching," Solar Energy 80, 701-706 (2006). [CrossRef]
  12. C. C. Striemer and P. M. Fauchet, "Dynamic etching of silicon for solar cell applications," Phys. Status Solidi A 197, 502-506 (2003). [CrossRef]
  13. M. W. Jenkins, "A New Preferential Etch for Defects in Silicon Crystals," J. Electrochem. Soc. 124, 757-762 (1977). [CrossRef]
  14. H. Sai, Y. Kanamori, K. Arafune, Y. Ohshita, and M. Yamaguchi, "Light trapping effect of submicron surface textures in crystalline Si solar cells," Prog. Photovolt: Res. Appl. 15, 415-423 (2007). [CrossRef]
  15. Y. C. Lee, C. F. Huang, J. Y. Chang, and M. T. Wu, "Enhanced light trapping based on guided mode resonance effect for thin film solar cells with two filling factor gratings," Opt. Express 16, 7969-7975 (2008). [CrossRef] [PubMed]

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