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Optics Express

Optics Express

  • Vol. 17, Iss. 7 — Mar. 30, 2009
  • pp: 5446–5456

Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors

Tero Jalkanen, Vicente Torres-Costa, Jarno Salonen, Mikko Bjürkqvist, Ermei Mökilö, Jose Manuel Martinez-Duart, and Vesa-Pekka Lehto  »View Author Affiliations

Optics Express, Vol. 17, Issue 7, pp. 5446-5456 (2009)

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In the present work, porous silicon (PS) based Bragg reflectors are fabricated, and the reactive PS surface is passivated by means of thermal carbonization (TC) by acetylene decomposition. The gas sensing properties of the reflectors are studied with different gas compositions and concentrations.Based on the results it can be concluded that thermally carbonized Bragg reflectors provide an easy and inexpensive means to produce chemically stable high quality PS reflectors with good gas sensing properties, which differ from those of unpassivated PS reflectors.

© 2009 Optical Society of America

OCIS Codes
(040.6040) Detectors : Silicon
(230.1480) Optical devices : Bragg reflectors
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(310.6845) Thin films : Thin film devices and applications

ToC Category:

Original Manuscript: January 7, 2009
Revised Manuscript: March 16, 2009
Manuscript Accepted: March 17, 2009
Published: March 20, 2009

Tero Jalkanen, Vicente Torres-Costa, Jarno Salonen, Mikko Björkqvist, Ermei Mäkilä, Jose Manuel Martínez-Duart, and Vesa-Pekka Lehto, "Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors," Opt. Express 17, 5446-5456 (2009)

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