42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide
Optics Express, Vol. 17, Issue 8, pp. 6252-6257 (2009)
http://dx.doi.org/10.1364/OE.17.006252
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Abstract
A compact pin Ge photodetector is integrated in submicron SOI rib waveguide. The detector length is reduced down to 15 μm using butt coupling configuration which is sufficient to totally absorb light at the wavelength of 1.55 μm. A -3 dB bandwidth of 42 GHz has been measured at a 4V reverse bias with a responsivity as high as 1 A/W at the wavelength of 1.55 μm and a low dark current density of 60 mA/cm2. At a wavelength of 1.52 μm, a responsivity of 1 A/W is obtained under -0.5 V bias. The process is fully compatible with CMOS technology.
© 2009 Optical Society of America
OCIS Codes
(040.1490) Detectors : Cameras
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects
(230.5160) Optical devices : Photodetectors
ToC Category:
Detectors
History
Original Manuscript: October 1, 2008
Revised Manuscript: November 13, 2008
Manuscript Accepted: December 16, 2008
Published: April 2, 2009
Citation
Laurent Vivien, Johann Osmond, Jean-Marc Fédéli, Delphine Marris-Morini, Paul Crozat, Jean-François Damlencourt, Eric Cassan, Y. Lecunff, and Suzanne Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-8-6252
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References
- G. T. Reed, "The optical age of silicon," Nature 427, 595-596 (2004). [CrossRef] [PubMed]
- L. Vivien, S. Lardenois, D. Pascal, S. Laval, E. Cassan, J-L. Cercus, A. Koster, J-M. Fédéli, and M. Heitzmann, "Experimental demonstration of a low-loss optical H-tree distribution using silicon-on-insulator microwaveguides," Appl. Phys. Lett. 85, 701-703 (2004). [CrossRef]
- P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004). [CrossRef]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, "High speed silicon Mach Zehnder modulator," Opt. Express 13, 3129-3135 (2005). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, "Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure," Opt. Express 16, 334-339 (2008). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J-M. Fédéli, D. Marris-Morini, J-F. Damlencourt, J. Mangeney, P. Crozat, L. El Melhaoui, E. Cassan, X. Le Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- D. Ahn, C.-yin Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, " High performance, waveguideintegrated Ge photodetectors," Opt. Express 15, 3916-3921 (2007). [CrossRef] [PubMed]
- T. Yin, R. Cohen, M. M. Morse, G. Sarid, Y. Chetrit, D. Rubin, and M. J. Paniccia, "31GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator sunstrate," Opt. Express 15, 13965-13971 (2007). [CrossRef] [PubMed]
- G. Masini, G. Capellini, J. Witzens, and C. Gunn, 4th International conference on Group IV photonics, WB2, 28, Tokyo, Japan, 19-21 September 2007.
- J. Wang, W. Y. Loh, K.T. Chua, H. Zang, Y. Z. Xiong, T. H. Loh, M. B. Yu, S. J. Lee, G.-Q. Lo, and D.-L. Kwong, "Evanescent-coupled Ge p-i-n photodetectors on Si-waveguide with SEG-Ge and comparative study of lateral and vertical p-i-n configurations," IEEE Electron. Dev. Lett. 29, 445-448 (2008) [CrossRef]
- K. W. Ang, S. Zhu, M. Yu, G.-Q. Lo, and D.-L. Kwong, "High performance waveguided Ge on SOI Metal-semiconductor-Metal photodetectors with novel silicon carbon (Si:C) schottky barrier enhancement layer," IEEE Photon. Technol. Lett. 20, 754-756 (2008) [CrossRef]
- L. Vivien, D. Marris-Morini, J-M. Fédéli, M. Rouvière, J-F. Damlencourt, L. El Melhaoui, X. Le Roux, P. Crozat, J. Mangeney, E. Cassan, and S. Laval, "Metal-semiconductor-metal Ge photodetectors integrated in Silicon waveguides," Appl. Phys. Lett. 92, 151114-151116 (2008) [CrossRef]
- A. Koster, E. Cassan, S. Laval, L. Vivien, and D. Pascal, "Ultra-compact splitter for submicrometer silicon-on-insulator rib waveguides," J. Opt. Soc. Am A 21, 2180-2185 (2004). [CrossRef]
- T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, "Microphotonics Devices Based on Silicon Micro-Fabrication Technology," IEEE J. Sel. Top. Quantum Electron. 11, 232-240 (2005). [CrossRef]
- S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouck, M. Heitzmann, N. Bouzaida, and L. Mollard, Opt. Lett. 28, 1150-1152 (2003). [CrossRef]
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