Multiplexed broadband beam steering
system utilizing high speed MEMS
mirrors

doi:10.1364/OE.17.007233

Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

Caleb Knoernschild, Changsoon Kim, Felix P. Lu, and Jungsang Kim »View Author Affiliations

Optics Express, Vol. 17, Issue 9, pp. 7233-7244 (2009)
http://dx.doi.org/10.1364/OE.17.007233

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References (19)
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Abstract

We present a beam steering system based on microelectromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5×5 array with 4 μs settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4685) Optical devices : Optical microelectromechanical devices
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Optical Devices

History
Original Manuscript: February 9, 2009
Revised Manuscript: April 9, 2009
Manuscript Accepted: April 13, 2009
Published: April 16, 2009

Citation
Caleb Knoernschild, Changsoon Kim, Felix P. Lu, and Jungsang Kim, "Multiplexed broadband beam steering system utilizing high speed MEMS mirrors," Opt. Express 17, 7233-7244 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-9-7233

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References

H. J. Shin, M. C. Pierce, D. Lee, H. Ra, O. Solgaard, and R. Richards-Kortum, "Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens," Opt. Express 15, 9113-9122 (2007). [PubMed]
W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).
A. M. Rollins, M. D. Kulkarni, S. Yazdanfar, R. Ung-arunyawee, and J. A. Izatt, "In vivo video rate optical coherence tomography," Opt. Express 3, 219-229 (1998). [PubMed]
J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).
V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).
S. H. Kim, Y. Yee, J. Choi, H. Kwon, M. H. Ha, C. Oh, and J. U. Bu, "Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage," Sens. Actuators, A 114, 429-437 (2004).
P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).
R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, "A rasterscanning full-motion video display using polysilicon micromachined mirrors," Sens. Actuators, A 83, 291-296 (2000).
D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003). [PubMed]
F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003). [PubMed]
M. Saffman and T. G. Walker, "Analysis of a quantum logic device based on dipole-dipole interactions of optically trapped Rydberg atoms," Phys. Rev. A 72, 042302 (2005).
S. Kim, R. R. Mcleod, M. Saffman, and K. H. Wagner, "Doppler-free, multiwavelength acousto-optic deflector for two-photon addressing arrays of Rb atoms in a quantum information processor," Appl. Opt. 47, 1816-1831 (2008). [PubMed]
C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008). [PubMed]
T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008). [PubMed]
G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).
C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).
A. J. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps," Proc. SPIE 4980, 87-96 (2003).
MEMSCAP, http://www.memscap.com.
Y. N. Picard, D. P. Adams, O. B. Spahn, S. M. Yalisove, D. J. Dagel, and J. Sobczak, "Low stress, high reflectivity thin films for MEMS mirrors," in MRS Symposium, vol. 729, 113-118 (2002), paper U3.11.

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[1] H. J. Shin, M. C. Pierce, D. Lee, H. Ra, O. Solgaard, and R. Richards-Kortum, "Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens," Opt. Express 15, 9113-9122 (2007). [PubMed]

[2] W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

[3] A. M. Rollins, M. D. Kulkarni, S. Yazdanfar, R. Ung-arunyawee, and J. A. Izatt, "In vivo video rate optical coherence tomography," Opt. Express 3, 219-229 (1998). [PubMed]

[4] J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

[5] V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

[6] S. H. Kim, Y. Yee, J. Choi, H. Kwon, M. H. Ha, C. Oh, and J. U. Bu, "Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage," Sens. Actuators, A 114, 429-437 (2004).

[7] P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

[8] R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, "A rasterscanning full-motion video display using polysilicon micromachined mirrors," Sens. Actuators, A 83, 291-296 (2000).

[9] D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003). [PubMed]

[10] F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003). [PubMed]

[11] M. Saffman and T. G. Walker, "Analysis of a quantum logic device based on dipole-dipole interactions of optically trapped Rydberg atoms," Phys. Rev. A 72, 042302 (2005).

[12] S. Kim, R. R. Mcleod, M. Saffman, and K. H. Wagner, "Doppler-free, multiwavelength acousto-optic deflector for two-photon addressing arrays of Rb atoms in a quantum information processor," Appl. Opt. 47, 1816-1831 (2008). [PubMed]

[13] C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008). [PubMed]

[14] T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008). [PubMed]

[15] G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

[16] C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

[17] A. J. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps," Proc. SPIE 4980, 87-96 (2003).

[18] MEMSCAP, http://www.memscap.com.

[19] Y. N. Picard, D. P. Adams, O. B. Spahn, S. M. Yalisove, D. J. Dagel, and J. Sobczak, "Low stress, high reflectivity thin films for MEMS mirrors," in MRS Symposium, vol. 729, 113-118 (2002), paper U3.11.

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Multiplexed broadband beam steering system utilizing high speed MEMS mirrors