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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 1 — Jan. 4, 2010
  • pp: 378–385

Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold

Xinyuan Dou, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Duo Ding, David Z. Pan, and Ray T. Chen  »View Author Affiliations

Optics Express, Vol. 18, Issue 1, pp. 378-385 (2010)

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In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50µm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

© 2009 OSA

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(130.5460) Integrated optics : Polymer waveguides

ToC Category:
Integrated Optics

Original Manuscript: November 11, 2009
Revised Manuscript: December 11, 2009
Manuscript Accepted: December 16, 2009
Published: December 23, 2009

Xinyuan Dou, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Duo Ding, David Z. Pan, and Ray T. Chen, "Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold," Opt. Express 18, 378-385 (2010)

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