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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 10 — May. 10, 2010
  • pp: 10188–10199

Structuring materials with nanosecond laser pulses

Sami T. Hendow and Sami A. Shakir  »View Author Affiliations


Optics Express, Vol. 18, Issue 10, pp. 10188-10199 (2010)
http://dx.doi.org/10.1364/OE.18.010188


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Abstract

Ablation of silicon and metals is investigated using a 1064 nm pulsed fiber laser, with pulse energy up to 0.5 mJ, peak powers up to 10 kW, and pulse widths from 10 to 250 ns. A simple thermal model is employed to explain the dependence of scribe depth and shape on pulse energy or peak power. We demonstrate that pulses of high peak powers have shallow penetration depths, while longer pulses with lower peak powers have a higher material removal rate with deeper scribes. The key parameter that enables such variation of performance with changes in peak pulse power or peak irradiance on the material surface is the nonlinear increase of the absorption coefficient of silicon or metals as its temperature increases.

© 2010 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.3510) Lasers and laser optics : Lasers, fiber
(350.3390) Other areas of optics : Laser materials processing
(140.3538) Lasers and laser optics : Lasers, pulsed
(140.3615) Lasers and laser optics : Lasers, ytterbium

ToC Category:
Laser Microfabrication

History
Original Manuscript: February 23, 2010
Revised Manuscript: April 9, 2010
Manuscript Accepted: April 17, 2010
Published: April 30, 2010

Citation
Sami T. Hendow and Sami A. Shakir, "Structuring materials with nanosecond laser pulses," Opt. Express 18, 10188-10199 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-10-10188


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References

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