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Absorbing one-dimensional planar photonic crystal for amorphous silicon solar cell

Ounsi El Daif, Emmanuel Drouard, Guillaume Gomard, Anne Kaminski, Alain Fave, Mustapha Lemiti, Sungmo Ahn, Sihan Kim, Pere Roca i Cabarrocas, Heonsu Jeon, and Christian Seassal

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Abstract

We report on the absorption of a 100nm thick hydrogenated amorphous silicon layer patterned as a planar photonic crystal (PPC), using laser holography and reactive ion etching. Compared to an unpatterned layer, electromagnetic simulation and optical measurements both show a 50% increase of the absorption over the 0.38-0.75micron spectral range, in the case of a one-dimensional PPC. Such absorbing photonic crystals, combined with transparent and conductive layers, may be at the basis of new photovoltaic solar cells.

©2010 Optical Society of America

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Figures (5)
Fig. 1
Fig. 1 (a) Schematics of a 1D PPC patterned in an absorbing layer (violet) deposited on a glass substrate (clear blue). (b) The material surface filling factor (ff) and the lattice parameter (L) of the 1DPC are indicated. Incoming light is normal to the layer, the two orientations of the electric field are shown.

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Fig. 2
Fig. 2 Contour mapping of the integrated absorbency of a 100nm patterned aSi:H layer deposited on glass. The proportion of absorbed solar light intensity, integrated over 380-750nm, is shown as a function of the PC parameters (L, ff, see Fig. 1).

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Fig. 3
Fig. 3 Close-up (a) and general scanning electron microscope (SEM) view (b) of a 400nm thick processed sample, covered by a thin chromium layer to increase the image quality.

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Fig. 4
Fig. 4 (a) Reflection and transmission spectra of the 95nm thick 1D PPC (shown for unpolarized light). (b) Derived absorption spectra of the same structure for Ex and Ey polarizations. (c) Absorption spectra of the 1D PPC structure (blue squares), of an unpatterned layer with the same thickness (red crosses), and of an unpatterned layer of 400nm (black plain circles with line). Simulations are also shown for the 1D PPC (blue continuous line) and the corresponding unpatterned structure (red continuous line).

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Fig. 5
Fig. 5 Experimental absorption ratio between the 95nm-thick patterned and unpatterned layers. No points are shown above 700nm as error bars are larger than the ratio, given the extremely small measured absolute values.

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