OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11097–11104

Thin autofocus camera module by a large-stroke micromachined deformable mirror

Hsin-Ta Hsieh, Hsiang-Chun Wei, Meng-Hsuan Lin, Wei-Yao Hsu, Yuan-Chieh Cheng, and Guo-Dung John Su  »View Author Affiliations

Optics Express, Vol. 18, Issue 11, pp. 11097-11104 (2010)

View Full Text Article

Enhanced HTML    Acrobat PDF (1464 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The conventional auto-focus and zoom image systems were made by a set of motor-moved lenses. Because of mechanical moving parts, it is not easy to miniaturize their sizes. In this paper, we propose a thin autofocus system using a large stroke MEMS (micro-electro-mechanical systems) deformable mirror which has the potential to downscale the size and to minimize chromatic aberration. The large stroke MEMS deformable mirror is made by a polyimide membrane that has a maximum 12 μm displacement over a 3 mm aperture. The module size is 5.4 mm thick in optical design layout and 6.7 mm after packaging. This autofocus system is designed with the f-number = 4.13, on-axis MTF = 0.28 at full frequency of 230 cycles/mm, and incident light within ± 26 degree. The position of clear image can vary from 4 cm to 50 cm achieved by controlling the surface curvature of the MEMS deformable mirror.

© 2010 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: April 5, 2010
Revised Manuscript: May 4, 2010
Manuscript Accepted: May 4, 2010
Published: May 11, 2010

Virtual Issues
Vol. 5, Iss. 10 Virtual Journal for Biomedical Optics

Hsin-Ta Hsieh, Hsiang-Chun Wei, Meng-Hsuan Lin, Wei-Yao Hsu, Yuan-Chieh Cheng, and Guo-Dung John Su, "Thin autofocus camera module by a large-stroke micromachined deformable mirror," Opt. Express 18, 11097-11104 (2010)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. R. C. Gutierrez, T. K. Tang, R. Calvet, and E. R. Fossum, “MEMS digital camera,” Proc. SPIE 6502, 1-8 (2007).
  2. S. Kuiper and B. H. W. Hendriks, “Variable-focus liquid lens for miniature cameras,” Appl. Phys. Lett. 85(7), 1128–1130 (2004). [CrossRef]
  3. H. Ren, Y. Fan, S. Gauza, and S. Wu, “Tunable-Focus Cylindrical Liquid Crystal Lens,” Jpn. J. Appl. Phys. 43(2), 652–653 (2004). [CrossRef]
  4. J. L. Wang, T. Y. Chen, Y. H. Chien, and G. D. Su, “Miniature optical autofocus camera by micromachined fluoropolymer deformable mirror,” Opt. Express 17(8), 6268–6274 (2009). [CrossRef] [PubMed]
  5. D. Wick, “Active Optical Zoom System,” US patent 6,977,777 (2005).
  6. W. Smith, Modern Optical Engineering: the design of optical systems, 2nd, (McGraw-Hill, 1990), pp.436.
  7. E. Hecht, Optics, 4nd (Addison Wesley, 2001). [PubMed]
  8. Boston Micromachines Corporation, http://www.bostonmicromachines.com/ .
  9. V. T. Srikar and S. M. Spearing, “Materials selection for microfabricated electrostatic actuators,” Sens. Actuators A Phys. 102(3), 279–285 (2003). [CrossRef]
  10. K. Seidl, J. Knobbe, and H. Grüger, “Design of an all-reflective unobscured optical-power zoom objective,” Appl. Opt. 48(21), 4097–4107 (2009). [CrossRef] [PubMed]
  11. J. Wang, T. Chen, C. Liu, C. Chiu, and G. Su, “Polymer Deformable Mirror for Optical Auto Focusing,” ETRI Journal 29(6), 817–819 (2007). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Supplementary Material

» Media 1: MOV (1082 KB)     

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited