OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11209–11215

A silicon nitride microdisk resonator with a 40-nm-thin horizontal air slot

Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin  »View Author Affiliations


Optics Express, Vol. 18, Issue 11, pp. 11209-11215 (2010)
http://dx.doi.org/10.1364/OE.18.011209


View Full Text Article

Enhanced HTML    Acrobat PDF (4904 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We design and fabricate pedestal-type, 15 μm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 μm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of ~34,000 (λres = 1523.7nm) and energy overlap in slot region of 21.6%.

© 2010 OSA

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.5750) Optical devices : Resonators

ToC Category:
Optical Devices

History
Original Manuscript: March 29, 2010
Revised Manuscript: May 7, 2010
Manuscript Accepted: May 9, 2010
Published: May 12, 2010

Citation
Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin, "A silicon nitride microdisk resonator with a
40-nm-thin horizontal air slot," Opt. Express 18, 11209-11215 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-11-11209


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004). [CrossRef] [PubMed]
  2. C. A. Barrios, K. B. Gylfason, B. Sánchez, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Slot-waveguide biochemical sensor,” Opt. Lett. 32(21), 3080–3082 (2007). [CrossRef] [PubMed]
  3. J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16(6), 4296–4301 (2008). [CrossRef] [PubMed]
  4. T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T.-D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, “Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V,” Appl. Phys. Lett. 92(16), 163303 (2008). [CrossRef]
  5. C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon-organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009). [CrossRef]
  6. A. H. J. Yang, S. D. Moore, B. S. Schmidt, M. Klug, M. Lipson, and D. Erickson, “Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides,” Nature 457(7225), 71–75 (2009). [CrossRef] [PubMed]
  7. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express 15(22), 14467–14475 (2007). [CrossRef] [PubMed]
  8. R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15(26), 17967–17972 (2007). [CrossRef] [PubMed]
  9. C. Creatore, L. C. Andreani, M. Miritello, R. Lo Savio, and F. Priolo, “Modification of erbium radiative lifetime in planar silicon slot waveguides,” Appl. Phys. Lett. 94(10), 103112–103113 (2009). [CrossRef]
  10. H. G. Yoo, Y. Fu, D. Riley, J. H. Shin, and P. M. Fauchet, “Birefringence and optical power confinement in horizontal multi-slot waveguides made of Si and SiO2.,” Opt. Express 16(12), 8623–8628 (2008). [CrossRef] [PubMed]
  11. R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, “Wafer-bonded single-crystal silicon slot waveguides and ring resonators,” Appl. Phys. Lett. 94(2), 021106 (2009). [CrossRef]
  12. R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8-nm slot waveguides,” IEEE Photon. Technol. Lett. 21(6), 353–355 (2009). [CrossRef]
  13. J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009). [CrossRef]
  14. D. Ahn, C. Y. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, “High performance, waveguide integrated Ge photodetectors,” Opt. Express 15(7), 3916–3921 (2007). [CrossRef] [PubMed]
  15. J. S. Chang, M.-K. Kim, Y.-H. Lee, J. H. Shin, and G. Y. Sung, “Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks,” Proc. SPIE 6897, 68970O (2008). [CrossRef]
  16. S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, “Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics,” Phys. Rev. Lett. 91(4), 043902 (2003). [CrossRef] [PubMed]
  17. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005). [CrossRef]
  18. K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008). [CrossRef]
  19. G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462(7273), 633–636 (2009). [CrossRef] [PubMed]
  20. X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17(23), 20911–20919 (2009). [CrossRef] [PubMed]
  21. T. Barwicz and H. I. Smith, “Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices,” J. Vac. Sci. Technol. B 21(6), 2892–2896 (2003). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited