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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11209–11215

A silicon nitride microdisk resonator with a 40-nm-thin horizontal air slot

Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin  »View Author Affiliations

Optics Express, Vol. 18, Issue 11, pp. 11209-11215 (2010)

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We design and fabricate pedestal-type, 15 μm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 μm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of ~34,000 (λres = 1523.7nm) and energy overlap in slot region of 21.6%.

© 2010 OSA

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.5750) Optical devices : Resonators

ToC Category:
Optical Devices

Original Manuscript: March 29, 2010
Revised Manuscript: May 7, 2010
Manuscript Accepted: May 9, 2010
Published: May 12, 2010

Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin, "A silicon nitride microdisk resonator with a
40-nm-thin horizontal air slot," Opt. Express 18, 11209-11215 (2010)

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