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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11444–11449

Optical ridge waveguides preserving the thermo-optic features in LiNbO3 crystals fabricated by combination of proton implantation and selective wet etching

Yang Tan and Feng Chen  »View Author Affiliations

Optics Express, Vol. 18, Issue 11, pp. 11444-11449 (2010)

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We report on a new, simple method to fabricate optical ridge waveguides in a z-cut LiNbO3 wafer by using proton implantation and selective wet etching. The measured modal field is well confined in the ridge waveguide region, which is also confirmed by the numerical simulation. With thermal annealing treatment at 400°C, the propagation loss of the ridge waveguides is determined to be as low as ~0.9 dB/cm. In addition, the measured thermo-optic coefficients of the waveguides are in good agreement with those of the bulk, suggesting potential applications in integrated photonics.

© 2010 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3730) Integrated optics : Lithium niobate
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

Original Manuscript: March 23, 2010
Revised Manuscript: May 7, 2010
Manuscript Accepted: May 11, 2010
Published: May 14, 2010

Yang Tan and Feng Chen, "Optical ridge waveguides preserving the thermo-optic features in LiNbO3 crystals fabricated by combination of proton implantation and selective wet etching," Opt. Express 18, 11444-11449 (2010)

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