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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11456–11463

Sensitivity increase for coating thickness determination using THz waveguides

M. Theuer, R. Beigang, and D. Grischkowsky  »View Author Affiliations


Optics Express, Vol. 18, Issue 11, pp. 11456-11463 (2010)
http://dx.doi.org/10.1364/OE.18.011456


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Abstract

We report on layer thickness determination down to a thickness of 2.5 microns using terahertz waveguide spectroscopy. Compared to typical single-pass transmission measurements in the time domain, the effective THz pulse delay is considerably increased for a given layer thickness by using the high filling factor of the THz waveguide. This corresponds to a sensitivity increase up to a factor of 50 for the measured delay, allowing the direct measurement of layer thicknesses down to below hundredths of a THz wavelength.

© 2010 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(130.2790) Integrated optics : Guided waves
(240.6690) Optics at surfaces : Surface waves
(300.6495) Spectroscopy : Spectroscopy, teraherz

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 30, 2010
Revised Manuscript: May 8, 2010
Manuscript Accepted: May 10, 2010
Published: May 14, 2010

Citation
M. Theuer, R. Beigang, and D. Grischkowsky, "Sensitivity increase for coating thickness determination using THz waveguides," Opt. Express 18, 11456-11463 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-11-11456


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References

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