OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11713–11719

SiC avalanche photodiode array with microlenses

Kejia Li, Han-Din Liu, Qiugui Zhou, Dion McIntosh, and Joe C. Campbell  »View Author Affiliations

Optics Express, Vol. 18, Issue 11, pp. 11713-11719 (2010)

View Full Text Article

Enhanced HTML    Acrobat PDF (1330 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A simple technique to incorporate microlenes with small photodiode arrays is demonstrated and analyzed. Using this method, the fill factor was increased from 2.6% to 22.4% for a two by two array. Simulation results are also shown. The photocurrent with microlens was approximately 8.6 times larger than without the microlens, which is consistent with simulation results.

© 2010 OSA

OCIS Codes
(350.3950) Other areas of optics : Micro-optics
(040.1345) Detectors : Avalanche photodiodes (APDs)

ToC Category:

Original Manuscript: April 7, 2010
Revised Manuscript: May 8, 2010
Manuscript Accepted: May 15, 2010
Published: May 18, 2010

Kejia Li, Han-Din Liu, Qiugui Zhou, Dion McIntosh, and Joe C. Campbell, "SiC avalanche photodiode array with microlenses," Opt. Express 18, 11713-11719 (2010)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. A. Shaw, A. M. Siegel, J. Model, and D. Greisokh, “Recent progress in short-range ultraviolet communication,” Proc. SPIE 5796, 214–225 (2005). [CrossRef]
  2. H. Liu, D. McIntosh, X. Bai, H. Pan, M. Liu, and J. C. Campbell, “4H-SiC PIN recessed window avalanche photodiode,” LEOS 2007 20th Annu. Meet. IEEE Lasers Electro-Opt. Soc. (2007), pp. 517–518.
  3. H. Liu, D. McIntosh, X. Bai, H. Pan, M. Liu, J. C. Campbell, and H. Y. Cha, “4H-SiC PIN recessed window avalanche photodiode with high quantum efficiency,” IEEE Photon. Technol. Lett. 20(18), 1551–1553 (2008). [CrossRef]
  4. A. Vert, S. Soloviev, J. Fronheiser, and P. Sandvik, “Solar-blind 4H-SiC single-photon avalanche diode operating in geiger mode,” IEEE Photon. Technol. Lett. 20(18), 1587–1589 (2008). [CrossRef]
  5. H.-Y. Cha, S. Soloviev, S. Zelakiewiez, P. Waldrab, and P. M. Sandvik, “Temperature dependent characteristics of nonreach-through 4H-SiC separate absorption and multiplication APDs for UV detection,” IEEE Sens. J. 8(3), 233–237 (2008). [CrossRef]
  6. J. Hu, X. Xin, X. Li, J. H. Zhao, B. L. VanMil, K. Lew, R. L. Myers-Ward, C. R. Eddy, and D. K. Gaskill, “4H-SiC visible-blind single-photon avalanche diode for ultraviolet detection at 280 and 350 nm,” IEEE Trans. Electron. Dev. 55(8), 1977–1983 (2008). [CrossRef]
  7. H. Liu, S. Chen, S. Dong, and X. Yi, “Bionic ommatidia based on microlens array,” Opt. Eng. 48(6), 063401 (2009). [CrossRef]
  8. Y. Ee, P. Kumnorkaew, R. A. Arif, H. Tong, H. Zhao, J. F. Gilchrist, and N. Tansu, “Optimization of light extraction efficiency of III-nitride LEDs with self-assembled colloidal-based microlenses,” IEEE J. Sel. Top. Quantum Electron. 15(4), 1218–1225 (2009). [CrossRef]
  9. H. Yang, C. Chao, M. Wei, and C. Lin, “High fill-factor microlens array mold insert fabrication using a thermal reflow process,” J. Micromech. Microeng. 14(8), 1197–1204 (2004). [CrossRef]
  10. B. Lee, K. J. Cha, and T. H. Kwon, “Fabrication of polymer micro nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold,” Microelectron. Eng. 86(4-6), 857–860 (2009). [CrossRef]
  11. P. Nussbaum, R. Völkel, H. Herzig, M. Eisner, and S. Haselbeck, “Design, fabrication and testing of microlens arrays for sensors and Microsystems,” Pure Appl. Opt. 6(6), 617–636 (1997). [CrossRef]
  12. P. Ruffieux, T. Scharf, I. Philipoussis, H. P. Herzig, R. Voelkel, and K. J. Weible, “Two step process for the fabrication of diffraction limited concave microlens arrays,” Opt. Express 16(24), 19541–19549 (2008). [CrossRef] [PubMed]
  13. Y.-H. Huang, C.-C. Yang, T.-C. Peng, M.-C. Wu, C.-L. Ho, and W.-J. Ho, “Alignment tolerance Enlargement of a high-speed photodiode by a self-positioned microball lens,” IEEE Photon. Technol. Lett. 18(1), 112–114 (2006). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited