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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 11 — May. 24, 2010
  • pp: 11859–11866

An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film

Nebiyu A. Yebo, Petra Lommens, Zeger Hens, and Roel Baets  »View Author Affiliations

Optics Express, Vol. 18, Issue 11, pp. 11859-11866 (2010)

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Optical structures fabricated on silicon-on-insulator technology provide a convenient platform for the implementation of highly compact, versatile and low cost devices. In this work, we demonstrate the promise of this technology for integrated low power and low cost optical gas sensing. A room temperature ethanol vapor sensor is demonstrated using a ZnO nanoparticle film as a coating on an SOI micro-ring resonator of 5 µm in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of around 3 nm diameter. The porous nature of the coating provides a large surface area for gas adsorption. The ZnO refractive index change upon vapor adsorption shifts the microring resonance through evanescent field interaction. Ethanol vapor concentrations down to 100 ppm are detected with this sensing configuration and a detection limit below 25 ppm is estimated.

© 2010 OSA

OCIS Codes
(130.6010) Integrated optics : Sensors
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:

Original Manuscript: March 26, 2010
Revised Manuscript: May 5, 2010
Manuscript Accepted: May 7, 2010
Published: May 20, 2010

Nebiyu A. Yebo, Petra Lommens, Zeger Hens, and Roel Baets, "An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film," Opt. Express 18, 11859-11866 (2010)

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