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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 13 — Jun. 21, 2010
  • pp: 13444–13450

Polarization insensitive resonance-domain blazed binary gratings

Heikki J. Hyvärinen, Petri Karvinen, and Jari Turunen  »View Author Affiliations

Optics Express, Vol. 18, Issue 13, pp. 13444-13450 (2010)

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Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period ~ 3.5λ at λ = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5745) Diffraction and gratings : Resonance domain
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

Original Manuscript: March 18, 2010
Revised Manuscript: May 10, 2010
Manuscript Accepted: May 10, 2010
Published: June 8, 2010

Heikki J. Hyvärinen, Petri Karvinen, and Jari Turunen, "Polarization insensitive resonance-domain blazed binary gratings," Opt. Express 18, 13444-13450 (2010)

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