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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 14 — Jul. 5, 2010
  • pp: 14319–14329

Small-size microlens characterization by multiwavelength high-resolution interference microscopy

Myun-Sik Kim, Toralf Scharf, and Hans Peter Herzig  »View Author Affiliations

Optics Express, Vol. 18, Issue 14, pp. 14319-14329 (2010)

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Microlenses are widely studied in two main areas: fabrication and characterization. Nowadays, characterization draws more attention because it is difficult to apply test techniques to microlenses that are used for conventional optical systems. Especially, small microlenses on a substrate are difficult to characterize because their back focus often stays in the substrate. Here we propose immersion high-resolution interference microscopy to characterize small-size microlenses at three visible wavelengths. Test results for 20-μm-diameter microlenses are presented and discussed. We cover not only standard characterizations like wavefront investigations but also experiments of actual focus properties and chromatic behaviors.

© 2010 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(180.3170) Microscopy : Interference microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 1, 2010
Revised Manuscript: June 7, 2010
Manuscript Accepted: June 7, 2010
Published: June 21, 2010

Myun-Sik Kim, Toralf Scharf, and Hans Peter Herzig, "Small-size microlens characterization by multiwavelength high-resolution interference microscopy," Opt. Express 18, 14319-14329 (2010)

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