Low loss shallow-ridge silicon waveguides

doi:10.1364/OE.18.014474

Low loss shallow-ridge silicon waveguides

Po Dong, Wei Qian, Shirong Liao, Hong Liang, Cheng-Chih Kung, Ning-Ning Feng, Roshanak Shafiiha, Joan Fong, Dazeng Feng, Ashok V. Krishnamoorthy, and Mehdi Asghari »View Author Affiliations

Optics Express, Vol. 18, Issue 14, pp. 14474-14479 (2010)
http://dx.doi.org/10.1364/OE.18.014474

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Abstract

We demonstrate low loss shallow-ridge silicon waveguides with an average propagation loss of 0.274 ± 0.008 dB/cm in the C-band (1530 nm - 1565 nm). These waveguides have a cross section of 0.25 µm by 2 µm and are fabricated by standard photolithography and dry etching. We also investigate a compact double-level taper which adiabatically couples light from these waveguides to silicon strip waveguides enabling tight bends.

OCIS Codes
(230.3120) Optical devices : Integrated optics devices
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

History
Original Manuscript: May 7, 2010
Revised Manuscript: June 11, 2010
Manuscript Accepted: June 14, 2010
Published: June 22, 2010

Citation
Po Dong, Wei Qian, Shirong Liao, Hong Liang, Cheng-Chih Kung, Ning-Ning Feng, Roshanak Shafiiha, Joan Fong, Dazeng Feng, Ashok V. Krishnamoorthy, and Mehdi Asghari, "Low loss shallow-ridge silicon waveguides," Opt. Express 18, 14474-14479 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-14-14474

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References

R. A. Soref, “The past, present and future of silicon photonics.” IEEE, J. Sel. Top. Quantm Electron. 12(6), 1678–1687 (2006). [CrossRef]
D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000). [CrossRef]
B. Jalali, M. Paniccia, and G. Reed, “Silicon photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006). [CrossRef]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009). [CrossRef]
Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005). [CrossRef] [PubMed]
W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express 15(25), 17106–17113 (2007). [CrossRef] [PubMed]
Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004). [CrossRef] [PubMed]
M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008). [CrossRef]
K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction,” Opt. Lett. 26(23), 1888–1890 (2001). [CrossRef]
P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16(5), 1328–1330 (2004). [CrossRef]
T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, M. Jun-ichi Takahashi, T. Takahashi, E. Shoji, S. Tamechika, Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005). [CrossRef]
W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005). [CrossRef]
T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, “Low-loss Si wire waveguides and their application to thermooptic switches,” Jpn. J. Appl. Phys. 45(No. 8B), 6658–6662 (2006). [CrossRef]
S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouzaida, and L. Mollard, “Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors,” Opt. Lett. 28(13), 1150–1152 (2003). [CrossRef] [PubMed]
M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch, “Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator,” Appl. Phys. Lett. 87(23), 231108 (2005). [CrossRef]
L. K. Rowe, M. Elsey, N. G. Tarr, A. P. Knights, and E. Post, “CMOS-compatible optical rib waveguides defined by local oxidation of silicon,” Electron. Lett. 43(7), 392–393 (2007). [CrossRef]
F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, “Sub-micron optical waveguides for silicon photonics formed via the Local Oxidation of Silicon (LOCOS),” Proc. SPIE 6898, 4 (2008).
R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt. 48(5), 958–963 (2009). [CrossRef] [PubMed]
J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009). [CrossRef] [PubMed]
S. T. Peng and A. A. Oliner, “Guidance and leakage properties of a class of open dielectric waveguides: Part I Mathematical Formulations,” IEEE Trans. Microw. Theory Tech. 29(9), 843–855 (1981). [CrossRef]
A. A. Oliner, S. T. Peng, T. I. Hsu, and A. Sanchez, “Guidance and leakage properties of a class of open dielectric waveguides: Part II – New physical effects,” IEEE Trans. Microw. Theory Tech. 29(9), 855–869 (1981). [CrossRef]
Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008). [CrossRef] [PubMed]
Rsoft Design Group, Inc., 400 Executive Boulevard, Suite 100, Ossining, N.Y. 10562, USA, www.rsoftdesign.com .
M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder Modulator,” IEEE J. Sel. Top. Quantum Electron. 16(1), 159–164 (2010). [CrossRef]
M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006). [CrossRef] [PubMed]
L. Yin, Q. Lin, and G. P. Agrawal, “Soliton fission and supercontinuum generation in silicon waveguides,” Opt. Lett. 32(4), 391–393 (2007). [CrossRef] [PubMed]

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[1] R. A. Soref, “The past, present and future of silicon photonics.” IEEE, J. Sel. Top. Quantm Electron. 12(6), 1678–1687 (2006). [CrossRef]

[2] D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000). [CrossRef]

[3] B. Jalali, M. Paniccia, and G. Reed, “Silicon photonics,” IEEE Microw. Mag. 7(3), 58–68 (2006). [CrossRef]

[4] A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97, 1337–1361 (2009). [CrossRef]

[5] Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005). [CrossRef] [PubMed]

[6] W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express 15(25), 17106–17113 (2007). [CrossRef] [PubMed]

[7] Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004). [CrossRef] [PubMed]

[8] M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008). [CrossRef]

[9] K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction,” Opt. Lett. 26(23), 1888–1890 (2001). [CrossRef]

[10] P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16(5), 1328–1330 (2004). [CrossRef]

[11] T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, M. Jun-ichi Takahashi, T. Takahashi, E. Shoji, S. Tamechika, Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005). [CrossRef]

[12] W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005). [CrossRef]

[13] T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, “Low-loss Si wire waveguides and their application to thermooptic switches,” Jpn. J. Appl. Phys. 45(No. 8B), 6658–6662 (2006). [CrossRef]

[14] S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouzaida, and L. Mollard, “Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors,” Opt. Lett. 28(13), 1150–1152 (2003). [CrossRef] [PubMed]

[15] M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch, “Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator,” Appl. Phys. Lett. 87(23), 231108 (2005). [CrossRef]

[16] L. K. Rowe, M. Elsey, N. G. Tarr, A. P. Knights, and E. Post, “CMOS-compatible optical rib waveguides defined by local oxidation of silicon,” Electron. Lett. 43(7), 392–393 (2007). [CrossRef]

[17] F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, “Sub-micron optical waveguides for silicon photonics formed via the Local Oxidation of Silicon (LOCOS),” Proc. SPIE 6898, 4 (2008).

[18] R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt. 48(5), 958–963 (2009). [CrossRef] [PubMed]

[19] J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009). [CrossRef] [PubMed]

[20] S. T. Peng and A. A. Oliner, “Guidance and leakage properties of a class of open dielectric waveguides: Part I Mathematical Formulations,” IEEE Trans. Microw. Theory Tech. 29(9), 843–855 (1981). [CrossRef]

[21] A. A. Oliner, S. T. Peng, T. I. Hsu, and A. Sanchez, “Guidance and leakage properties of a class of open dielectric waveguides: Part II – New physical effects,” IEEE Trans. Microw. Theory Tech. 29(9), 855–869 (1981). [CrossRef]

[22] Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008). [CrossRef] [PubMed]

[23] Rsoft Design Group, Inc., 400 Executive Boulevard, Suite 100, Ossining, N.Y. 10562, USA, www.rsoftdesign.com .

[24] M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder Modulator,” IEEE J. Sel. Top. Quantum Electron. 16(1), 159–164 (2010). [CrossRef]

[25] M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441(7096), 960–963 (2006). [CrossRef] [PubMed]

[26] L. Yin, Q. Lin, and G. P. Agrawal, “Soliton fission and supercontinuum generation in silicon waveguides,” Opt. Lett. 32(4), 391–393 (2007). [CrossRef] [PubMed]

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Low loss shallow-ridge silicon waveguides