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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 14 — Jul. 5, 2010
  • pp: 14480–14487

Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance

Tetsuo Iwata and Yasuhiro Mizutani  »View Author Affiliations


Optics Express, Vol. 18, Issue 14, pp. 14480-14487 (2010)
http://dx.doi.org/10.1364/OE.18.014480


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Abstract

In order to carry out precise measurements of the thickness of a dielectric layer deposited on a metal surface, we have introduced an ellipsometric measurement technique (EMT) to the modified Otto’s configuration (MOC) that is used for observing surface plasmon resonance (SPR). For that purpose, we have measured the thickness of the Au layer by the EMT at four different locations on an elliptic fringe pattern obtained from the MOC basing on a four-layer structure model: prism (BK7)-air-Au-substrate (BK7). Then, we have measured that of a TiO2 layer deposited on the Au layer by the EMT basing on a five-layer structure model: prism (BK7)-air-TiO2-Au-substrate (BK7). We have found experimentally that the combination of EMT and MOC is effective for measuring the thickness of the dielectric layer on the metal.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:
Optics at Surfaces

History
Original Manuscript: May 7, 2010
Revised Manuscript: June 9, 2010
Manuscript Accepted: June 17, 2010
Published: June 22, 2010

Citation
Tetsuo Iwata and Yasuhiro Mizutani, "Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance," Opt. Express 18, 14480-14487 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-14-14480


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References

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