OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 14 — Jul. 5, 2010
  • pp: 14480–14487

Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance

Tetsuo Iwata and Yasuhiro Mizutani  »View Author Affiliations

Optics Express, Vol. 18, Issue 14, pp. 14480-14487 (2010)

View Full Text Article

Enhanced HTML    Acrobat PDF (1065 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



In order to carry out precise measurements of the thickness of a dielectric layer deposited on a metal surface, we have introduced an ellipsometric measurement technique (EMT) to the modified Otto’s configuration (MOC) that is used for observing surface plasmon resonance (SPR). For that purpose, we have measured the thickness of the Au layer by the EMT at four different locations on an elliptic fringe pattern obtained from the MOC basing on a four-layer structure model: prism (BK7)-air-Au-substrate (BK7). Then, we have measured that of a TiO2 layer deposited on the Au layer by the EMT basing on a five-layer structure model: prism (BK7)-air-TiO2-Au-substrate (BK7). We have found experimentally that the combination of EMT and MOC is effective for measuring the thickness of the dielectric layer on the metal.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:
Optics at Surfaces

Original Manuscript: May 7, 2010
Revised Manuscript: June 9, 2010
Manuscript Accepted: June 17, 2010
Published: June 22, 2010

Tetsuo Iwata and Yasuhiro Mizutani, "Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance," Opt. Express 18, 14480-14487 (2010)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. T. Iwata and G. Komoda,“Measurements of complex refractive indices of metals at several wavelengths by frustrated total internal reflection due to surface plasmon resonance,” Appl. Opt. 47, 2386-2391 (2008). [CrossRef] [PubMed]
  2. Y. P. Bliokh, R. Vander, S. G. Lipson, and J. Felsteiner, “Visualization of the complex refractive index of a conductor by frustrated total internal reflection, Appl. Phys. Lett. 89, 021908 (2006). [CrossRef]
  3. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings, (Springer-Verlag, 1988).
  4. A. Otto, “Excitation of nonradiative surface waves in silver by the method of frustrated total reflection,” Z. Phys. 216, 398-410 (1968). [CrossRef]
  5. E. Z. Kretschmann, “Die Bestimmung Optischer Konstanten von Mettlen duch Anregung von Oberfl¨achenplasmaschwingungen, Z. Phys. 241, 313-324 (1971). [CrossRef]
  6. T. Iwata and S. Maeda, “Simulation of an absorption-based surface-plasmon resonance sensor by means of ellipsometry,” Appl. Opt. 46, 1575-1582 (2007). [CrossRef] [PubMed]
  7. M. Osterfeld and H. Franke, “Optical gas detection using metal film enhanced leaky mode spectroscopy, Appl. Phys. Lett. 62, 2310-2312 (1993). [CrossRef]
  8. L. Levesque, B. E. Paton, and S. H. Payne, “Precise thickness and refractive index determination of polymide films using attenuated total reflection, Appl. Opt. 33, 8036-8040 (1994). [CrossRef] [PubMed]
  9. L. Levesque and B. E. Paton, “Detection of defects in multiple-layer structures by using surface plasmon resonance, Appl. Opt. 36, 7199-75203 (1997). [CrossRef]
  10. F. Yang, J. R. Sambeles, and G. W. Bradberry, “Long-range surface modes supported by thin films, Phys. Rev. B 44, 5855-5872 (1991). [CrossRef]
  11. M. Fukui and K. Matsugi, “Attenuated total reflection mode of surface polaritons in semi-infinite and finite superlattices, J. Phys. Soc. Jpn. 56, 2964-2976 (1987). [CrossRef]
  12. M. Takabayashi, H. Shiba, M. Haraguchi, and M. Fukui, “Studies on surface polaritons in ultrathin films sandwitched by identical dielectrics, J. Phys. Soc. Jpn. 61, 2550-2556 (1992). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited