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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 14 — Jul. 5, 2010
  • pp: 15009–15016

Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun  »View Author Affiliations

Optics Express, Vol. 18, Issue 14, pp. 15009-15016 (2010)

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We demonstrate the fabrication of diffractive optical elements (DOEs) on 3-Dimensional curved surfaces by capillary force lithography (CFL). Curved gratings with a period of 20μm and 820nm have been successfully fabricated in polymer on concave surfaces by CFL. The experiment results indicate that the capillary force lithography is an effective method to replicate DOEs on curved surfaces with a very high fidelity and a relatively fast speed. In addition, we found that the growth rate of the polymer in the sub-microfabrication is much faster and the step height is much closer to the master than that in the microfabrication for CFL, which makes CFL more attractive in the fabrication of DOEs with a sub-microscale or even nanoscale feature size than a microscale feature size.

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OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

Original Manuscript: May 5, 2010
Revised Manuscript: June 5, 2010
Manuscript Accepted: June 9, 2010
Published: June 29, 2010

Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun, "Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography," Opt. Express 18, 15009-15016 (2010)

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