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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 15 — Jul. 19, 2010
  • pp: 15609–15617

Planar and ridge waveguides formed in LiNbO3 by proton exchange combined with oxygen ion implantation

Shao-Mei Zhang, Ke-Ming Wang, Xiangzhi Liu, Zhuanfang Bi, and Xiu-Hong Liu  »View Author Affiliations

Optics Express, Vol. 18, Issue 15, pp. 15609-15617 (2010)

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We report on the fabrication of planar and ridge waveguides in lithium niobate by proton exchange combined with oxygen ion implantation. The implanted energy ranges from 600 to 1400 keV with a dose of 1×1015 ions/cm2. The modes in proton exchanged waveguide can be modulated by O ion implantation. There are different damage profiles in proton-exchanged and ion-implanted waveguides in Rutherford backscattering/channeling spectra. The refractive index profile in single-mode waveguide in lithium niobate has been obtained based on Intensity Calculation Method. Also ridge waveguide was fabricated on the basis of planar waveguide by Ar ion beam etching. The measured near-field intensity distributions of the ridge waveguide modes show a reasonable agreement with the simulated ones. The estimated propagation loss was ~2.2 dB/cm.

© 2010 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3730) Integrated optics : Lithium niobate
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

Original Manuscript: April 28, 2010
Revised Manuscript: June 11, 2010
Manuscript Accepted: June 23, 2010
Published: July 8, 2010

Shao-Mei Zhang, Ke-Ming Wang, Xiangzhi Liu, Zhuanfang Bi, and Xiu-Hong Liu, "Planar and ridge waveguides formed in LiNbO3 by proton exchange combined with oxygen ion implantation," Opt. Express 18, 15609-15617 (2010)

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