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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 15 — Jul. 19, 2010
  • pp: 16133–16138

Micromachined lens microstages for two-dimensional forward optical scanning

Hyeon-Cheol Park, Cheol Song, and Ki-Hun Jeong  »View Author Affiliations


Optics Express, Vol. 18, Issue 15, pp. 16133-16138 (2010)
http://dx.doi.org/10.1364/OE.18.016133


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Abstract

This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by MEMS actuation. Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path. The compact integration secures the effective beam aperture of 0.6 mm within the device width of 2 mm. The lens mass provides high-Q motions at low operating voltages of DC 5 V and AC 10 Vpp, i.e., the lateral angle of ±4.6° at 277 Hz and the vertical angle of ±5.3° at 204 Hz. The device can provide a new direction for miniaturizing laser scanning based endoscopes or handheld projectors.

© 2010 OSA

OCIS Codes
(120.3890) Instrumentation, measurement, and metrology : Medical optics instrumentation
(120.5800) Instrumentation, measurement, and metrology : Scanners
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 26, 2010
Revised Manuscript: July 5, 2010
Manuscript Accepted: July 7, 2010
Published: July 15, 2010

Virtual Issues
Vol. 5, Iss. 12 Virtual Journal for Biomedical Optics

Citation
Hyeon-Cheol Park, Cheol Song, and Ki-Hun Jeong, "Micromachined lens microstages for two-dimensional forward optical scanning," Opt. Express 18, 16133-16138 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-15-16133


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