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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 15 — Jul. 19, 2010
  • pp: 16234–16242

High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime

I.V. Kozhevnikov, R. van der Meer, H.M.J. Bastiaens, K.-J. Boller, and F. Bijkerk  »View Author Affiliations

Optics Express, Vol. 18, Issue 15, pp. 16234-16242 (2010)

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High resolution while maintaining high peak reflectivities can be achieved for Lamellar Multilayer Amplitude Gratings (LMAG) in the soft-x-ray (SXR) region. Using the coupled waves approach (CWA), it is derived that for small lamellar widths only the zeroth diffraction order needs to be considered for LMAG performance calculations, referred to as the single-order regime. In this regime, LMAG performance can be calculated by assuming a conventional multilayer mirror with decreased density, which significantly simplifies the calculations. Novel analytic criteria for the design of LMAGs are derived from the CWA and it is shown, for the first time, that the resolution of an LMAG operating in the single-order regime is not limited by absorption as in conventional multilayer mirrors. It is also shown that the peak reflectivity of an LMAG can then still be as high as that of a conventional multilayer mirror (MM). The performance of LMAGs operating in the single-order regime are thus only limited by technological factors.

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OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(340.0340) X-ray optics : X-ray optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

Original Manuscript: May 17, 2010
Revised Manuscript: June 30, 2010
Manuscript Accepted: July 8, 2010
Published: July 16, 2010

I.V. Kozhevnikov, R. van der Meer, H.M.J. Bastiaens, K.-J. Boller, and F. Bijkerk, "High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime," Opt. Express 18, 16234-16242 (2010)

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