OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 15 — Jul. 19, 2010
  • pp: 16234–16242

High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime

I.V. Kozhevnikov, R. van der Meer, H.M.J. Bastiaens, K.-J. Boller, and F. Bijkerk  »View Author Affiliations


Optics Express, Vol. 18, Issue 15, pp. 16234-16242 (2010)
http://dx.doi.org/10.1364/OE.18.016234


View Full Text Article

Enhanced HTML    Acrobat PDF (966 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

High resolution while maintaining high peak reflectivities can be achieved for Lamellar Multilayer Amplitude Gratings (LMAG) in the soft-x-ray (SXR) region. Using the coupled waves approach (CWA), it is derived that for small lamellar widths only the zeroth diffraction order needs to be considered for LMAG performance calculations, referred to as the single-order regime. In this regime, LMAG performance can be calculated by assuming a conventional multilayer mirror with decreased density, which significantly simplifies the calculations. Novel analytic criteria for the design of LMAGs are derived from the CWA and it is shown, for the first time, that the resolution of an LMAG operating in the single-order regime is not limited by absorption as in conventional multilayer mirrors. It is also shown that the peak reflectivity of an LMAG can then still be as high as that of a conventional multilayer mirror (MM). The performance of LMAGs operating in the single-order regime are thus only limited by technological factors.

© 2010 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(340.0340) X-ray optics : X-ray optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 17, 2010
Revised Manuscript: June 30, 2010
Manuscript Accepted: July 8, 2010
Published: July 16, 2010

Citation
I.V. Kozhevnikov, R. van der Meer, H.M.J. Bastiaens, K.-J. Boller, and F. Bijkerk, "High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime," Opt. Express 18, 16234-16242 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-15-16234


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender, and M. J. Lercel, “Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition”, 651701:1–9, Proc SPIE, 6517 (2007)
  2. R. A. M. Keski-Kuha and A. M. Ritva, “Layered synthetic microstructure technology considerations for the extreme ultraviolet,” Appl. Opt. 23(20), 3534 (1984). [CrossRef] [PubMed]
  3. B. Vidal, P. Vincent, P. Dhez, and M. Neviere, “Thin films and gratings - Theories to optimize the high reflectivity of mirrors and gratings for X-ray optics ”, 142–149, Proc. SPIE, 563 (1985)
  4. R. Benbalagh, J.-M. André, R. Barchewitz, P. Jonnard, G. Julié, L. Mollard, G. Rolland, C. Rémond, P. Troussel, R. Marmoret, and E. O. Filatova, “Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator,” Nucl. Instrum. Methods 541(3), 590–597 (2005). [CrossRef]
  5. A. Sammar, M. Ouahabi, R. Barchewitz, J.-M. André, R. Rivoira, C. Khan Malek, F. R. Ladan, and P. Guérin, “Theoretical and experimental study of soft X-ray diffraction by a lamellar multilayer amplitude grating ,” J. Opt. 24(1), 37–41 (1993). [CrossRef]
  6. T. Peng, “Rigorous formulation of scattering and guidance by dielectric grating waveguides: general case of oblique incidence,” J. Opt. Soc. Am. 6(12), 1869–1883 (1989). [CrossRef]
  7. A. Coves, B. Gimeno, J. Gil, M. V. Andres, A. A. San Blas, and V. E. Boria, “Full-wave analysis of dielectric frequency-selective surfaces using a vectorial modal method,” IEEE Trans. Antenn. Propag. 52(8), 2091–2099 (2004). [CrossRef]
  8. L. I. Goray, “Numerical analysis of the efficiency of multilayer-coated gratings using integral method,” Nucl. Instrum. Methods 536(1-2), 211–221 (2005). [CrossRef]
  9. A. Sammar, J.-M. André, and B. Pardo, “Diffraction and scattering by lamellar amplitude multilayer gratings in the X-UV region,” Opt. Commun. 86(2), 245–254 (1991). [CrossRef]
  10. K. Krastev, J.-M. André, and R. Barchewitz, “Further applications of a recursive modal method for calculating the efficiencies of X-UV multilayer gratings,” J. Opt. Soc. Am. A 13(10), 2027 (1996). [CrossRef]
  11. L. I. Goray, and J. F. Seely, “Wavelength separation of plus and minus orders of soft-x-ray-EUV multilayer-coated gratings at near-normal incidence”, 81–91, Proc. SPIE, 5900 (2005)
  12. A. I. Erko, B. Vidal, P. Vincent, Yu. A. Agafonov, V. V. Martynov, D. V. Roschupkin, and M. Brunel, “Multilayer gratings efficiency: numerical and physical experiments,” Nucl. Instrum. Methods Phys. Res. 333(2-3), 599–606 (1993). [CrossRef]
  13. V. V. Martynov, B. Vidal, P. Vincent, M. Brunel, D. V. Roschupkin, A. Yu Agafonov, A.I. Erko, and A. Yakshin, “Comparison of modal and differential methods for multilayer gratings,” Nucl. Instrum. Methods Phys. Res. 339(3), 617–625 (1994). [CrossRef]
  14. R. Benbalagh, “Monochromateurs Multicouches à bande passante étroite et à faible fond continu pour le rayonnement X-UV”, PhD Thesis, University of Paris VI, Paris, 2003.
  15. I. V. Kozhevnikov and A. V. Vinogradov, “Basic formulae of XUV multilayer optics,” Phys. Scr. T 137–14517, (1987). [CrossRef]
  16. R. Petit, Electromagnetic Theory of Gratings, Springer-Verlag, Berlin, 1980.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited