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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 16 — Aug. 2, 2010
  • pp: 16580–16586

Multi-objective genetic algorithm applied to spectroscopic ellipsometry of organic-inorganic hybrid planar waveguides

Vasco R. Fernandes, Carlos M. S. Vicente, Naoya Wada, Paulo S. André, and Rute A. S. Ferreira  »View Author Affiliations

Optics Express, Vol. 18, Issue 16, pp. 16580-16586 (2010)

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The applicably of multi-objective optimization to ellipsometric data analysis is presented and a method to handle complex ellipsometric problems such as multi sample or multi angle analysis using multi-objective optimization is described. The performance of a multi-objective genetic algorithm (MOGA) is tested against a single objective common genetic algorithm (CGA). The procedure is applied to the characterization (refractive index and thickness) of planar waveguides intended for the production of optical components prepared sol-gel derived organic-inorganic hybrids, so-called di-ureasils, modified with zirconium tetrapropoxide, Zr(OPrn)4 deposited on silica on silicon substrates. The results show that for the same initial conditions, MOGA performs better than the CGA, showing a higher success rate in the task of finding the best final solution.

© 2010 OSA

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 9, 2010
Revised Manuscript: July 3, 2010
Manuscript Accepted: July 5, 2010
Published: July 22, 2010

Vasco R. Fernandes, Carlos M. S. Vicente, Naoya Wada, Paulo S. André, and Rute A. S. Ferreira, "Multi-objective genetic algorithm applied to spectroscopic ellipsometry of organic-inorganic hybrid planar waveguides," Opt. Express 18, 16580-16586 (2010)

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