A new method for the measurement of anisotropic stress in thin films based on 2-D fast Fourier transform (FFT) is presented. A modified Twyman-Green interferometer was used for surface topography measurement. A fringe normalization technique was also used to improve the phase extraction technique efficiently. The measurement of anisotropic stress in obliquely deposited MgF₂ thin film was demonstrated.

© 2010 OSA

1. M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed. (Academic Press, 2004).
2. A. J. Perry, J. A. Sue, and P. J. Martin, “Practical measurement of the residual stress in coatings,” Surface Coatings Technol. 8l, 17–28 (l996).
3. W. D. Nix, “Mechanical properties of thin films,” Metall. Trans. A 20A, 2217–2245 (1989).
4. C. L. Tien, C. C. Lee, Y. L. Tsai, and W. S. Sun, “Determination of the mechanical properties of thin films by digital phase shifting interferometry,” Opt. Commun. 198(4-6), 325–331 (2001). [CrossRef]
5. L. B. Freund, and S. Suresh, Thin Films:Materials: Stress, Defect Formation and Surface Evolution (Cambridge University Press, 2003).
6. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]
7. M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22(24), 3977–3982 (1983). [CrossRef] [PubMed]
8. W. W. Macy., “Two-dimensional fringe-pattern analysis,” Appl. Opt. 22(23), 3898–3901 (1983). [CrossRef] [PubMed]
9. G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character 82(553), 172–175 (1909). [CrossRef]
10. A. Brenner and S. Senderoff, “Calculation of stress in electrodeposits from the curvature of a plated strip,” J. Res. Nat’l. Bur. Stand. 42, 105–123 (1949).
11. E. van de Riet, “Deflection of a substrate induced by an anisotropic thin-film stress,” J. Appl. Phys. 76(1), 584–586 (1994). [CrossRef]
12. C. L. Tien, S. S. Jyu, and H. M. Yang, “A method for fringe normalization by Zernike polynomial,” Opt. Rev. 16(2), 173–175 (2009). [CrossRef]

Brenner, A.
Ina, H.
Jyu, S. S.
Kobayashi, S.
Lee, C. C.
Macy, W. W.
Mutoh, K.
Nix, W. D.
Senderoff, S.
Stoney, G. G.
Sun, W. S.
Takeda, M.
Tien, C. L.
Tsai, Y. L.
van de Riet, E.
Yang, H. M.

Appl. Opt.

• M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22(24), 3977–3982 (1983). [CrossRef] [PubMed]
• W. W. Macy., “Two-dimensional fringe-pattern analysis,” Appl. Opt. 22(23), 3898–3901 (1983). [CrossRef] [PubMed]

J. Appl. Phys.

• E. van de Riet, “Deflection of a substrate induced by an anisotropic thin-film stress,” J. Appl. Phys. 76(1), 584–586 (1994). [CrossRef]

J. Opt. Soc. Am.

• M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]

J. Res. Nat’l. Bur. Stand.

• A. Brenner and S. Senderoff, “Calculation of stress in electrodeposits from the curvature of a plated strip,” J. Res. Nat’l. Bur. Stand. 42, 105–123 (1949).

Metall. Trans. A

• W. D. Nix, “Mechanical properties of thin films,” Metall. Trans. A 20A, 2217–2245 (1989).

Opt. Commun.

• C. L. Tien, C. C. Lee, Y. L. Tsai, and W. S. Sun, “Determination of the mechanical properties of thin films by digital phase shifting interferometry,” Opt. Commun. 198(4-6), 325–331 (2001). [CrossRef]

Opt. Rev.

• C. L. Tien, S. S. Jyu, and H. M. Yang, “A method for fringe normalization by Zernike polynomial,” Opt. Rev. 16(2), 173–175 (2009). [CrossRef]

Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character

• G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character 82(553), 172–175 (1909). [CrossRef]

Other

• L. B. Freund, and S. Suresh, Thin Films:Materials: Stress, Defect Formation and Surface Evolution (Cambridge University Press, 2003).
• M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed. (Academic Press, 2004).
• A. J. Perry, J. A. Sue, and P. J. Martin, “Practical measurement of the residual stress in coatings,” Surface Coatings Technol. 8l, 17–28 (l996).

2009, Tien, Opt. Rev.
2001, Tien, Opt. Commun.
1994, van de Riet, J. Appl. Phys.
1989, Nix, Metall. Trans. A
1983, Macy, Appl. Opt.
1983, Takeda, Appl. Opt.
1982, Takeda, J. Opt. Soc. Am.
1949, Brenner, J. Res. Nat’l. Bur. Stand.
1909, Stoney, Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character

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