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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 16 — Aug. 2, 2010
  • pp: 17180–17186

A method for evaluating subsurface damage in optical glass

Yaguo Li, Hao Huang, Ruiqing Xie, Haibo Li, Yan Deng, Xianhua Chen, Jian Wang, Qiao Xu, Wei Yang, and Yinbiao Guo  »View Author Affiliations

Optics Express, Vol. 18, Issue 16, pp. 17180-17186 (2010)

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An alternative method for evaluating subsurface damage (SSD) in ground fused silica is presented. The method can acquire the knowledge of depth and morphology of subsurface damage at the same time. The fundamental support lent to the method is the fact that the depth of field reduces as the numerical aperture (NA)/magnification increases in optical microscopes. Large depth of field without undermining NA is preferred in most applications while the narrow range of focus depth is desired for our method. Using this method, we experimented on fused silica which was ground with bound-abrasive diamond wheels and the results show good agreement with the traditional method. The consistency indicates that the proposed method is practicable and effective in inspecting the subsurface damage in optical components.

© 2010 OSA

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing
(350.3850) Other areas of optics : Materials processing

ToC Category:
Optical Design and Fabrication

Original Manuscript: July 1, 2010
Revised Manuscript: July 18, 2010
Manuscript Accepted: July 19, 2010
Published: July 28, 2010

Yaguo Li, Hao Huang, Ruiqing Xie, Haibo Li, Yan Deng, Xianhua Chen, Jian Wang, Qiao Xu, Wei Yang, and Yinbiao Guo, "A method for evaluating subsurface damage in optical glass," Opt. Express 18, 17180-17186 (2010)

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