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Method of multiple references for 3D imaging with Fourier transform interferometry |
Optics Express, Vol. 18, Issue 17, pp. 17591-17596 (2010)
http://dx.doi.org/10.1364/OE.18.017591
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Abstract
This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03mm.
© 2010 OSA
OCIS Codes
(110.2350) Imaging systems : Fiber optics imaging
(110.6880) Imaging systems : Three-dimensional image acquisition
(110.3175) Imaging systems : Interferometric imaging
(110.2650) Imaging systems : Fringe analysis
ToC Category:
Imaging Systems
History
Original Manuscript: March 25, 2010
Revised Manuscript: June 3, 2010
Manuscript Accepted: June 28, 2010
Published: August 2, 2010
Citation
Evan Lally, Jianmin Gong, and Anbo Wang, "Method of multiple references for 3D imaging with Fourier transform interferometry," Opt. Express 18, 17591-17596 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-17-17591
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References
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