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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 17 — Aug. 16, 2010
  • pp: 18086–18094

Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

Dawn N. Vitek, Daniel E. Adams, Adrea Johnson, Philbert S. Tsai, Sterling Backus, Charles G. Durfee, David Kleinfeld, and Jeffrey A. Squier  »View Author Affiliations

Optics Express, Vol. 18, Issue 17, pp. 18086-18094 (2010)

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Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (~1 mm) features with parallel sidewalls are ablated at high material removal rates (25 µm3 per 80 µJ pulse) at 0.04-0.05 NA. This technique is applied to the fabrication of microfluidic devices by ablation through the back surface of thick (6 mm) fused silica substrates. It is also used to ablate bone under aqueous immersion to produce craniotomies.

© 2010 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(170.1020) Medical optics and biotechnology : Ablation of tissue
(190.4360) Nonlinear optics : Nonlinear optics, devices
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Laser Microfabrication

Original Manuscript: July 1, 2010
Revised Manuscript: August 2, 2010
Manuscript Accepted: August 3, 2010
Published: August 6, 2010

Virtual Issues
Vol. 5, Iss. 13 Virtual Journal for Biomedical Optics

Dawn N. Vitek, Daniel E. Adams, Adrea Johnson, Philbert S. Tsai, Sterling Backus, Charles G. Durfee, David Kleinfeld, and Jeffrey A. Squier, "Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials," Opt. Express 18, 18086-18094 (2010)

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