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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 18 — Aug. 30, 2010
  • pp: 19114–19119

Fabrication of aspherical SU-8 microlens array utilizing novel stamping process and electro-static pulling method

Shu-Ming Kuo and Che-Hsin Lin  »View Author Affiliations

Optics Express, Vol. 18, Issue 18, pp. 19114-19119 (2010)

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A simple and novel method is proposed for the fabrication of aspherical SU-8 microlens arrays with a wide range of tunable focal lengths utilizing a soft SU-8 stamping process and an electro-static pulling method. In the proposed approach, an SU-8 stamp incorporating a micro-nozzle array and a reservoir containing unexposed SU-8 is fabricated on a glass substrate using a dose-controlled exposure process. Microlens arrays with diameters ranging from 20 to 500 μm and various radii of curvature are successfully fabricated using the proposed method. The low surface roughness (Ra = 3.84 nm) and high dimensional uniformity of the SU-8 microlens arrays (variation < 5% designed diameter) confirm both the optical quality of the individual microlenses and the general feasibility of the fabrication method. The innovative fabrication method proposed in this study provides a simple and efficient means of producing high quality aspherical microlens arrays with tunable focal lengths.

© 2010 OSA

OCIS Codes
(080.3630) Geometric optics : Lenses
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: May 25, 2010
Revised Manuscript: June 16, 2010
Manuscript Accepted: June 26, 2010
Published: August 25, 2010

Shu-Ming Kuo and Che-Hsin Lin, "Fabrication of aspherical SU-8 microlens array utilizing novel stamping process and electro-static pulling method," Opt. Express 18, 19114-19119 (2010)

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