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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 19 — Sep. 13, 2010
  • pp: 20086–20095

Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

Afshin Ghaffari, Amir Hosseini, Xiaochuan Xu, David Kwong, Harish Subbaraman, and Ray T. Chen  »View Author Affiliations


Optics Express, Vol. 18, Issue 19, pp. 20086-20095 (2010)
http://dx.doi.org/10.1364/OE.18.020086


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Abstract

This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This technique is promising to realize high density integration of multilayer hybrid structures on flexible substrates.

© 2010 OSA

OCIS Codes
(040.6040) Detectors : Silicon
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: June 2, 2010
Revised Manuscript: August 12, 2010
Manuscript Accepted: August 16, 2010
Published: September 3, 2010

Citation
Afshin Ghaffari, Amir Hosseini, Xiaochuan Xu, David Kwong, Harish Subbaraman, and Ray T. Chen, "Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates," Opt. Express 18, 20086-20095 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-19-20086


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