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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 2 — Jan. 18, 2010
  • pp: 1159–1165

High resolution heterodyne interferometer without detectable periodic nonlinearity

Ki-Nam Joo, Jonathan D. Ellis, Eric S. Buice, Jo W. Spronck, and Robert H. Munnig Schmidt  »View Author Affiliations

Optics Express, Vol. 18, Issue 2, pp. 1159-1165 (2010)

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A high resolution heterodyne laser interferometer without periodic nonlinearity for linear displacement measurements is described. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. In this research, a simple interferometer configuration for both retroreflector and plane mirror targets which are both applicable to industrial applications was developed. Experimental results show there is no detectable periodic nonlinearity for both of the retro-reflector interferometer and plane mirror interferometer to the noise level of 20 pm. Additionally, the optical configuration has the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Because of non-symmetry in the plane mirror interferometer, a differential plane mirror interferometer to reduce the thermal error is also discussed.

© 2010 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: September 11, 2009
Revised Manuscript: December 21, 2009
Manuscript Accepted: December 23, 2009
Published: January 8, 2010

Ki-Nam Joo, Jonathan D. Ellis, Eric S. Buice, Jo W. Spronck, and Robert H. Munnig Schmidt, "High resolution heterodyne interferometer without detectable periodic nonlinearity," Opt. Express 18, 1159-1165 (2010)

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  1. W. T. Estler, “High-accuracy displacement interferometry in air,” Appl. Opt. 24(6), 808–815 (1985). [CrossRef] [PubMed]
  2. H. Bosse and G. Wilkening, “Developments at PTB in nanometrology for support of the semiconductor industry,” Meas. Sci. Technol. 16(11), 2155–2166 (2005). [CrossRef]
  3. N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4(9), 907–926 (1993). [CrossRef]
  4. F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Meas. Sci. Technol. 9(7), 1024–1030 (1998). [CrossRef]
  5. R. C. Quenelle, “Nonlinearity in interferometer measurements,” Hewlett Packard J. 34, 10 (1983).
  6. W. Hou and G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precis. Eng. 14(2), 91–98 (1992). [CrossRef]
  7. S. J. A. G. Cosijns, H. Haitjema, and P. H. J. Schellekens, “Modeling and verifying non-linearities in heterodyne displacement interferometry,” Precis. Eng. 26(4), 448–455 (2002). [CrossRef]
  8. V. G. Badami and S. R. Patterson, “A frequency domain method for the measurement of nonlinearity in heterodyne interferometry,” Precis. Eng. 24(1), 41–49 (2000). [CrossRef]
  9. T. Eom, T. Choi, K. Lee, H. Choi, and S. Lee, “A simple method for the compensation of the nonlinearity in the heterodyne interferometer,” Meas. Sci. Technol. 13(2), 222–225 (2002). [CrossRef]
  10. H. Haitjema, S. J. A. G. Cosijns, N. J. J. Roset, M. J. Jansen, and P. H. J. Schellekens, “Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty,” Proc. SPIE , 347–354 (2003). [CrossRef]
  11. D. Chu, and A. Ray, “Nonlinearity measurement and correction of metrology data from an interferometer system,” Proc. of 4th euspen Int. Conf., 300–301 (2004).
  12. T. L. Schmitz, D. Chu, and L. Houck, “First-order periodic error correction: validation for constant and non-constant velocities with variable error magnitudes,” Meas. Sci. Technol. 17(12), 3195–3203 (2006). [CrossRef]
  13. M. Tanaka, T. Yamagami, and K. Nakayama, “Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement),” IEEE Trans. Instrum. Meas. 38(2), 552–554 (1989). [CrossRef]
  14. C. M. Wu, J. Lawall, and R. D. Deslattes, “Heterodyne interferometer with subatomic periodic nonlinearity,” Appl. Opt. 38(19), 4089–4094 (1999). [CrossRef]
  15. J. Lawall and E. Kessler, “Michelson interferometry with 10 pm accuracy,” Rev. Sci. Instrum. 71(7), 2669–2676 (2000). [CrossRef]
  16. T. L. Schmitz and J. F. Beckwith, “Acousto-optic displacement-measuring interferometer: a new heterodyne interferometer with Anstrom-level periodic error,” J. Mod. Opt. 49(13), 2105–2114 (2002). [CrossRef]
  17. K.-N. Joo, J. D. Ellis, J. W. Spronck, P. J. M. van Kan, and R. H. M. Schmidt, “Simple heterodyne laser interferometer with subnanometer periodic errors,” Opt. Lett. 34(3), 386–388 (2009). [CrossRef] [PubMed]

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