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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 2 — Jan. 18, 2010
  • pp: 1310–1315

Optical metrology of randomly-distributed Au colloids on a multilayer film

Shih-Hsin Hsu, Yia-Chung Chang, Yi-Chun Chen, Pei-Kuen Wei, and Y. D. Kim  »View Author Affiliations

Optics Express, Vol. 18, Issue 2, pp. 1310-1315 (2010)

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Spectroscopic ellipsometry (SE) measurements coupled with efficient theoretical modeling and scanning electron microscopy analysis are used in the metrology of randomly-distributed gold nanoparticles on a multilayer film. Measurements were conducted in the ultraviolet to near infrared region at several angles of incidence. To understand the size, shape, and distribution of nanoparticles, a finite-element Green's function approach considering the scattering from multiple nanoparticles was employed to calculate the ellipsometry parameters. Our calculations are in fair agreement with the ellipsometry measurements when suitable size, shape, and distribution pattern of nanoparticles are found. This demonstrates that SE could be a useful tool to the metrology of arbitrarily-distributed nanoparticles on a multilayer film.

© 2010 OSA

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 19, 2009
Revised Manuscript: January 6, 2010
Manuscript Accepted: January 6, 2010
Published: January 12, 2010

Shih-Hsin Hsu, Yia-Chung Chang, Yi-Chun Chen, Pei-Kuen Wei, and Y. D. Kim, "Optical metrology of randomly-distributed Au colloids on a multilayer film," Opt. Express 18, 1310-1315 (2010)

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