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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 2 — Jan. 18, 2010
  • pp: 1734–1740

Improvement of linewidth in laser beam lithographed computer generated hologram

Hyug-Gyo Rhee and Yun-Woo Lee  »View Author Affiliations


Optics Express, Vol. 18, Issue 2, pp. 1734-1740 (2010)
http://dx.doi.org/10.1364/OE.18.001734


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Abstract

We propose a new laser lithographic technique with enhanced resolution. A calcite wave plate is introduced in our system to separate an input lithographic beam into two orthogonally polarized beams. After going through an imaging lens, these two beams meet again on the focal point, and generate a small interferogram that sharpens the shape of the focused beam spot. Using this phenomenon, we can overcome the diffraction limit of the imaging lens and achieve a 486-nm-linewidth.

© 2010 OSA

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: December 11, 2009
Revised Manuscript: January 7, 2010
Manuscript Accepted: January 8, 2010
Published: January 14, 2010

Citation
Hyug-Gyo Rhee and Yun-Woo Lee, "Improvement of linewidth in laser beam lithographed computer generated hologram," Opt. Express 18, 1734-1740 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-2-1734


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References

  1. H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, “Testing of aspheric surfaces,” Proc. SPIE 4440, 109–119 (2001). [CrossRef]
  2. M. Haruna, M. Takahashi, K. Wakahayashi, and H. Nishihara, “Laser beam lithographed micro-Fresnel lenses,” Appl. Opt. 29(34), 5120–5126 (1990). [CrossRef] [PubMed]
  3. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33(11), 3556–3566 (1994). [CrossRef]
  4. A. G. Poleshchuk, E. G. Churin, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, V. V. Cherkashin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, and A. G. Verhoglyad, “Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure,” Appl. Opt. 38(8), 1295–1301 (1999). [CrossRef]
  5. J.-M. Asfour and A. G. Poleshchuk, “Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram,” J. Opt. Soc. Am. A 23(1), 172–178 (2006). [CrossRef]
  6. P. Zhou and J. H. Burge, “Coupling of surface roughness to the performance of computer-generated holograms,” Appl. Opt. 46(26), 6572–6576 (2007). [CrossRef] [PubMed]
  7. J. H. Burge, “Fabrication of large circular diffractive optics,” in Diffractive Optics and Micro-Optics, OSA Tech. Dig. 10 (1998).
  8. J. W. Goodman, “Analog optical information processing,” in Introduction to Fourier optics, 2nd ed., (McGraw-Hill, Singapore, 1996), Chap. 4.
  9. V. Westphal, C. M. Blanca, M. Dyba, L. Kastrup, and S. W. Hell, “Laser-diode-stimulated emission depletion microscopy,” Appl. Phys. Lett. 82(18), 3125–3127 (2003). [CrossRef]
  10. C. H. Lee, H. Y. Chiang, and H. Y. Mong, “Sub-diffraction-limit imaging based on the topographic contrast of differential confocal microscopy,” Opt. Lett. 28(19), 1772–1774 (2003). [CrossRef] [PubMed]
  11. D. Kang and D. Gweon, “Enhancement of lateral resolution in confocal self-interference microscopy,” Opt. Lett. 28(24), 2470–2472 (2003). [CrossRef] [PubMed]
  12. D.-I. Kim, H.-G. Rhee, J.-B. Song, and Y.-W. Lee, “Laser output stabilization for direct laser writing system by using an acousto-optic modulator,” Rev. Sci. Instrum. 78, 1–4 (2007). [CrossRef]
  13. D. K. Cohen, W. H. Gee, M. Ludeke, and J. Lewkowicz, “Automatic focus control: the astigmatic lens approach,” Appl. Opt. 23(4), 565–570 (1984). [CrossRef] [PubMed]
  14. H.-G. Rhee, D.-I. Kim, and Y.-W. Lee, “Realization and performance evaluation of high speed autofocusing for direct laser lithography,” Rev. Sci. Instrum. 80, 1–5 (2009). [CrossRef]
  15. ASME B46, 1–2002, “Terminology and measurement procedures for profiling, contact, skidless instruments,”in Surface texture (Surface roughness, waviness, and lay). (Amer. Soc. of Mech. Engrs., New York, 2003), Section 3.

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