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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 2 — Jan. 18, 2010
  • pp: 566–574

High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley  »View Author Affiliations


Optics Express, Vol. 18, Issue 2, pp. 566-574 (2010)
http://dx.doi.org/10.1364/OE.18.000566


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Abstract

We present a systematic study of femtosecond laser microchannel machining in glass using nondiffracting Bessel beams. In particular, our results identify a source and focusing parameter working window where high aspect ratio taper-free microchannels can be reproducibly produced without sample translation. With appropriate source parameters, we machine channels of 2 µm diameter and with aspect ratios up to 40. We propose the filamentation stability of the Bessel beam propagation as the critical factor underlying the controlled and reproducible results that have been obtained.

© 2010 OSA

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(190.7110) Nonlinear optics : Ultrafast nonlinear optics
(320.2250) Ultrafast optics : Femtosecond phenomena
(350.3390) Other areas of optics : Laser materials processing
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Laser Microfabrication

History
Original Manuscript: October 23, 2009
Revised Manuscript: November 30, 2009
Manuscript Accepted: November 30, 2009
Published: January 4, 2010

Citation
M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, "High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams," Opt. Express 18, 566-574 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-2-566


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