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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 2 — Jan. 18, 2010
  • pp: 566–574

High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley  »View Author Affiliations

Optics Express, Vol. 18, Issue 2, pp. 566-574 (2010)

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We present a systematic study of femtosecond laser microchannel machining in glass using nondiffracting Bessel beams. In particular, our results identify a source and focusing parameter working window where high aspect ratio taper-free microchannels can be reproducibly produced without sample translation. With appropriate source parameters, we machine channels of 2 µm diameter and with aspect ratios up to 40. We propose the filamentation stability of the Bessel beam propagation as the critical factor underlying the controlled and reproducible results that have been obtained.

© 2010 OSA

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(190.7110) Nonlinear optics : Ultrafast nonlinear optics
(320.2250) Ultrafast optics : Femtosecond phenomena
(350.3390) Other areas of optics : Laser materials processing
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Laser Microfabrication

Original Manuscript: October 23, 2009
Revised Manuscript: November 30, 2009
Manuscript Accepted: November 30, 2009
Published: January 4, 2010

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, "High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams," Opt. Express 18, 566-574 (2010)

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  1. R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2(4), 219–225 (2008). [CrossRef]
  2. G. Della Valle, R. Osellame, and P. Laporta, “Micromachining of photonic devices by femtosecond laser pulses,” J. Opt. A, Pure Appl. Opt. 11(1), 013001 (2009). [CrossRef]
  3. G. M. Whitesides, “The origins and the future of microfluidics,” Nature 442(7101), 368–373 (2006). [CrossRef] [PubMed]
  4. D. Psaltis, S. R. Quake, and C. Yang, “Developing optofluidic technology through the fusion of microfluidics and optics,” Nature 442(7101), 381–386 (2006). [CrossRef] [PubMed]
  5. H. Craighead, “Future lab-on-a-chip technologies for interrogating individual molecules,” Nature 442(7101), 387–393 (2006). [CrossRef] [PubMed]
  6. L. C. Campbell, M. J. Wilkinson, A. Manz, P. Camilleri, and C. J. Humphreys, “Electrophoretic manipulation of single DNA molecules in nanofabricated capillaries,” Lab Chip 4(3), 225–229 (2004). [CrossRef] [PubMed]
  7. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, and E. E. B. Campbell, “Micromachining of quartz with ultrashort laser pulses,” Appl. Phys., A Mater. Sci. Process. 65(4-5), 367–373 (1997). [CrossRef]
  8. J. Schwarz and J. C. Diels, “UV filaments and their application for laser-induced lightning and high-aspect-ratio hole drilling,” Appl. Phys., A Mater. Sci. Process. 77, 185–191 (2003).
  9. L. Luo, D. Wang, C. Li, H. Jiang, H. Yang, and Q. Gong, “Formation of diversiform microstructures in wide-bandgap materials by tight-focusing femtosecond laser pulses,” J. Opt. A, Pure Appl. Opt. 4(1), 105–110 (2002). [CrossRef]
  10. Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express 12(10), 2120–2129 (2004), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-10-2120 . [CrossRef] [PubMed]
  11. D. Wortmann, J. Gottmann, N. Brandt, and H. Horn-Solle, “Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching,” Opt. Express 16(3), 1517–1522 (2008), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-3-1517 . [CrossRef] [PubMed]
  12. S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates,” J. Phys. Chem. C 113(27), 11560–11566 (2009). [CrossRef]
  13. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001). [CrossRef]
  14. K. Ke, E. F. Hasselbrink, and A. J. Hunt, “Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates,” Anal. Chem. 77(16), 5083–5088 (2005). [CrossRef] [PubMed]
  15. L. Sudrie, A. Couairon, M. Franco, B. Lamouroux, B. Prade, S. Tzortzakis, and A. Mysyrowicz, “Femtosecond laser-induced damage and filamentary propagation in fused silica,” Phys. Rev. Lett. 89(18), 186601 (2002). [CrossRef] [PubMed]
  16. A. Couairon and A. Mysyrowicz, “Femtosecond filamentation in transparent media,” Phys. Rep. 441(2-4), 47–189 (2007). [CrossRef]
  17. K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, “Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching,” Opt. Express 17(10), 8685–8695 (2009), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-10-8685 . [CrossRef] [PubMed]
  18. J. Durnin, J. J. Miceli, and J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58(15), 1499–1501 (1987). [CrossRef] [PubMed]
  19. Y. Matsuoka, Y. Kizuka, and T. Inoue, “The characteristics of laser micro drilling using a Bessel beam,” Appl. Phys., A Mater. Sci. Process. 84(4), 423–430 (2006). [CrossRef]
  20. F. Courvoisier, P.-A. Lacourt, M. Jacquot, M. K. Bhuyan, L. Furfaro, and J. M. Dudley, “Surface nanoprocessing with nondiffracting femtosecond Bessel beams,” Opt. Lett. 34(20), 3163–3165 (2009). [CrossRef] [PubMed]
  21. J. Amako, D. Sawaki, and E. Fujii, “Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics,” J. Opt. Soc. Am. B 20(12), 2562–2568 (2003). [CrossRef]
  22. V. Zambon, N. McCarthy, and M. Piché, “Fabrication of photonic devices directly written in glass using ultrafast Bessel beams,” Proc. SPIE 7099, 70992J/1–5 (2008).
  23. D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 94(3), 555–558 (2009). [CrossRef]
  24. N. T. Nguyen, A. Saliminia, S. L. Chin, and R. Vallee, “Control of femtosecond laser written waveguides in silica glass,” Appl. Phys. B 85(1), 145–148 (2006). [CrossRef]
  25. R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, “Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses,” Opt. Express 13(6), 1855–1859 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-6-1855 . [CrossRef] [PubMed]
  26. P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008). [CrossRef]
  27. Z. Song, Z. Zhang, and T. Nakajima, “Transverse-mode dependence of femtosecond filamentation,” Opt. Express 17(15), 12217–12229 (2009), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-15-12217 . [CrossRef] [PubMed]
  28. D. J. Hwang, T. Y. Choi, and C. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004). [CrossRef]
  29. D. Ashkenasi, M. Lorenz, R. Stoian, and A. Rosenfeld, “Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation,” Appl. Surf. Sci. 150(1-4), 101–106 (1999). [CrossRef]
  30. A. Zoubir, L. Shah, K. Richardson, and M. Richardson, “Practical uses of femtosecond laser micro-materials processing,” Appl. Phys., A Mater. Sci. Process. 77, 311–315 (2003).
  31. D. Rayner, A. Naumov, and P. Corkum, “Ultrashort pulse non-linear optical absorption in transparent media,” Opt. Express 13(9), 3208–3217 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-9-3208 . [CrossRef] [PubMed]

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