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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 20 — Sep. 27, 2010
  • pp: 20690–20698

High performance nanophotonic circuits based on partially buried horizontal slot waveguides

Chi Xiong, Wolfram H.P. Pernice, Mo Li, and Hong X. Tang  »View Author Affiliations


Optics Express, Vol. 18, Issue 20, pp. 20690-20698 (2010)
http://dx.doi.org/10.1364/OE.18.020690


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Abstract

We present a novel platform to construct high-performance nanophotonic devices in low refractive index dielectric films at telecoms wavelengths. The formation of horizontal slots by PECVD deposition of high index amorphous silicon provides a convenient and low-cost way to tailor nanophotonic devices to application needs. Low propagation loss of less than 2 dB/cm is obtained allowing us to fabricate optical resonators with measured high optical quality factors exceeding 105. We design and experimentally demonstrate on-chip grating couplers to efficiently couple light into integrated circuitry with coupling loss of 4 dB and optical bandwidth exceeding 110 nm. The entire on-chip circuitry consisting of input/output couplers, Mach-Zehnder interferometers with high extinction ratio and ring, racetrack resonators are designed, fabricated and characterized.

© 2010 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.7380) Optical devices : Waveguides, channeled
(350.4238) Other areas of optics : Nanophotonics and photonic crystals

ToC Category:
Integrated Optics

History
Original Manuscript: July 9, 2010
Manuscript Accepted: September 6, 2010
Published: September 15, 2010

Citation
Chi Xiong, Wolfram H.P. Pernice, Mo Li, and Hong X. Tang, "High performance nanophotonic circuits based on partially buried horizontal slot waveguides," Opt. Express 18, 20690-20698 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-20-20690


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References

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